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Study of a grating interferometer with high optical subdivision technique 会议论文
HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS VII
Authors:  Lu, Yancong;  Zhou, Changhe;  Li, Shubin;  Wei, Chunlong;  Li, Minkang;  Xiang, Xiansong;  Deng, Jili;  Xiang, Changcheng;  Jia, Wei;  Yu, Junjie;  Wang, Jin;  Li, Chao;  chazhou@mail.shcnc.ac.cn
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Study of a grating interferometer with high optical subdivision technique 会议论文
HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS VII
Authors:  Lu, Yancong;  Zhou, Changhe;  Li, Shubin;  Wei, Chunlong;  Li, Minkang;  Xiang, Xiansong;  Deng, Jili;  Xiang, Changcheng;  Jia, Wei;  Yu, Junjie;  Wang, Jin;  Li, Chao;  chazhou@mail.shcnc.ac.cn
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Image grating metrology using phase-stepping interferometry in scanning beam interference lithography 会议论文
HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS VII
Authors:  Li, Minkang;  Zhou, Changhe;  Wei, Chunlong;  Jia, Wei;  Lu, Yancong;  Xiang, Changcheng;  Xiang, XianSong;  chazhou@mail.shcnc.ac.cn
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Interference pattern period measurement at picometer level 会议论文
HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS VII
Authors:  Xiang, Xiansong;  Wei, Chunlong;  Jia, Wei;  Zhou, Changhe;  Li, Minkang;  Lu, Yancong;  xiangxs@siom.ac.cn
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Image grating metrology using phase-stepping interferometry in scanning beam interference lithography 会议论文
HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS VII
Authors:  Li, Minkang;  Zhou, Changhe;  Wei, Chunlong;  Jia, Wei;  Lu, Yancong;  Xiang, Changcheng;  Xiang, XianSong;  chazhou@mail.shcnc.ac.cn
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Interference pattern period measurement at picometer level 会议论文
HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS VII
Authors:  Xiang, Xiansong;  Wei, Chunlong;  Jia, Wei;  Zhou, Changhe;  Li, Minkang;  Lu, Yancong;  xiangxs@siom.ac.cn
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Two-degree-freedom displacement measurement based on a short period grating in symmetric Littrow configuration 期刊论文
Opt. Commun., 2016, 卷号: 380, 页码: 382
Authors:  Lu, Yancong;  Wei, Chunlong;  Jia, Wei;  Li, Shubin;  Yu, Junjie;  Li, Minkang;  Xiang, Changcheng;  Xiang, Xiansong;  Wang, Jin;  Ma, Jianyong;  Zhou, Changhe;  chazhou@mail.shcnc.ac.cn
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Pitch evaluation of gratings based on a digital image correlation technique 期刊论文
Opt. Commun., 2016, 卷号: 365, 页码: 68
Authors:  Lu, Yancong;  Jia, Wei;  Wei, Chunlong;  Yu, Junjie;  Li, Shubin;  Li, Yanyang;  Li, Minkang;  Qiu, Jucheng;  Wang, Shaoqing;  Zhou, Changhe;  chazhou@mail.shcnc.ac.cn
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Pitch evaluation of gratings based on a digital image correlation technique 期刊论文
Opt. Commun., 2016, 卷号: 365, 页码: 68
Authors:  Lu, Yancong;  Jia, Wei;  Wei, Chunlong;  Yu, Junjie;  Li, Shubin;  Li, Yanyang;  Li, Minkang;  Qiu, Jucheng;  Wang, Shaoqing;  Zhou, Changhe;  chazhou@mail.shcnc.ac.cn
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Two-degree-freedom displacement measurement based on a short period grating in symmetric Littrow configuration 期刊论文
Opt. Commun., 2016, 卷号: 380, 页码: 382
Authors:  Lu, Yancong;  Wei, Chunlong;  Jia, Wei;  Li, Shubin;  Yu, Junjie;  Li, Minkang;  Xiang, Changcheng;  Xiang, Xiansong;  Wang, Jin;  Ma, Jianyong;  Zhou, Changhe;  chazhou@mail.shcnc.ac.cn
Favorite  |  View/Download:62/0  |  Submit date:2017/12/25