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Influence of different post-treatments on the structure and optical properties of zinc oxide thin films
Hong RJ(洪瑞金); Huang JB; He HB(贺洪波); Fan ZX(范正修); Shao JD(邵建达)
2005
Source PublicationAppl. Surf. Sci.
ISSN0169-4332
Volume242Issue:3~4Pages:346
AbstractZinc oxide (ZnO) films with c-oriented were grown on fused quartz glass substrates at room temperature using dc reactive magnetron sputtering. The as-grown films were annealed at 700 degrees C in air and bombarded by ion beam, respectively. The effects of post-treatments on the structural and optical properties of the ZnO films were investigated by X-ray diffraction (XRD), photoluminescence (PL), optical transmittance and absorption measurements. The XRD spectra indicate that the crystal quality of ZnO films has been improved by both the post-treatments. Compared with the as-grown sample, both annealed and bombarded samples exhibited blueshift in the UV emission peaks, and a strong green emission was found in the annealed ZnO film. In both optical transmittance and absorption spectra, a blueshift of the band-gap edge was observed in the bombarded film, while a redshift was observed in the annealed film. (c) 2004 Elsevier B.V. All rights reserved.
KeywordZinc Oxide Thin Films Annealing Ion Beam Bombardment
Subject Area光学薄膜
Indexed Byei
Language英语
WOS IDWOS:000227853200019
Citation statistics
Cited Times:174[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.siom.ac.cn/handle/181231/4358
Collection光学薄膜技术研究与发展中心
Recommended Citation
GB/T 7714
Hong RJ,Huang JB,He HB,et al. Influence of different post-treatments on the structure and optical properties of zinc oxide thin films[J]. Appl. Surf. Sci.,2005,242(3~4):346, 352.
APA 洪瑞金,Huang JB,贺洪波,范正修,&邵建达.(2005).Influence of different post-treatments on the structure and optical properties of zinc oxide thin films.Appl. Surf. Sci.,242(3~4),346.
MLA 洪瑞金,et al."Influence of different post-treatments on the structure and optical properties of zinc oxide thin films".Appl. Surf. Sci. 242.3~4(2005):346.
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