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Internal Laser Writing of High-Aspect-Ratio Microfluidic Structures in Silicate Glasses for Lab-on-a-Chip Applications
Cheng, Ya; ycheng@phy.ecnu.edu.cn
2017
发表期刊Micromachines
卷号8期号:2
摘要Femtosecond laser direct writing is unique in allowing for fabrication of 3D micro- and nanofluidic structures, thereby enabling rapid and efficient manipulation of fluidic dynamics in 3D space to realize innovative functionalities. Here, I discuss the challenges in producing fully functional and highly integrated 3D micro- and nanofluidic systems with potential applications ranging from chemical and biological analyses to investigations of nanofluidic behaviors. In particular, I review the achievements we have made in the past decade, which have led to 3D microchannels with controllable cross-sectional profiles and large aspect ratios, 3D nanofluidic channels with widths of several tens of nanometers, and smooth inner walls with roughness on the order of similar to 1 nm. Integration of the microfluidics with other functional microcomponents including microoptics and microelectrodes will also be discussed, followed by conclusions and the future perspective.
文章类型Review
部门归属强光
DOI10.3390/mi8020059
资助者National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61590934, 11134010, 61327902] ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61590934, 11134010, 61327902] ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61590934, 11134010, 61327902] ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61590934, 11134010, 61327902]
收录类别SCI
资助者National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61590934, 11134010, 61327902] ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61590934, 11134010, 61327902] ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61590934, 11134010, 61327902] ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61590934, 11134010, 61327902]
WOS记录号WOS:000395476000029
引用统计
被引频次:4[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28648
专题强场激光物理国家重点实验室
通讯作者ycheng@phy.ecnu.edu.cn
作者单位中国科学院上海光学精密机械研究所
推荐引用方式
GB/T 7714
Cheng, Ya,ycheng@phy.ecnu.edu.cn. Internal Laser Writing of High-Aspect-Ratio Microfluidic Structures in Silicate Glasses for Lab-on-a-Chip Applications[J]. Micromachines,2017,8(2).
APA Cheng, Ya,&ycheng@phy.ecnu.edu.cn.(2017).Internal Laser Writing of High-Aspect-Ratio Microfluidic Structures in Silicate Glasses for Lab-on-a-Chip Applications.Micromachines,8(2).
MLA Cheng, Ya,et al."Internal Laser Writing of High-Aspect-Ratio Microfluidic Structures in Silicate Glasses for Lab-on-a-Chip Applications".Micromachines 8.2(2017).
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