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High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions
Tan, Yuanxin; Wang, Zhaohui; Chu, Wei; Liao, Yang; Qiao, Lingling; Cheng, Ya; ya.cheng@siom.ac.cn
2016
发表期刊Opt. Mater. Express
卷号6期号:12页码:3787
摘要We report on the fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of similar to 100 mu m. (C) 2016 Optical Society of America
文章类型Article
部门归属强光
DOI10.1364/OME.6.003787
资助者National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61327902, 11104294, 61275205, 61405220, 61221064, 11304330]; Youth Innovation Promotion Association of Chinese Academy of Sciences ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61327902, 11104294, 61275205, 61405220, 61221064, 11304330]; Youth Innovation Promotion Association of Chinese Academy of Sciences ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61327902, 11104294, 61275205, 61405220, 61221064, 11304330]; Youth Innovation Promotion Association of Chinese Academy of Sciences ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61327902, 11104294, 61275205, 61405220, 61221064, 11304330]; Youth Innovation Promotion Association of Chinese Academy of Sciences
收录类别SCI
资助者National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61327902, 11104294, 61275205, 61405220, 61221064, 11304330]; Youth Innovation Promotion Association of Chinese Academy of Sciences ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61327902, 11104294, 61275205, 61405220, 61221064, 11304330]; Youth Innovation Promotion Association of Chinese Academy of Sciences ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61327902, 11104294, 61275205, 61405220, 61221064, 11304330]; Youth Innovation Promotion Association of Chinese Academy of Sciences ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61327902, 11104294, 61275205, 61405220, 61221064, 11304330]; Youth Innovation Promotion Association of Chinese Academy of Sciences
WOS记录号WOS:000390408500011
引用统计
被引频次:7[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28640
专题强场激光物理国家重点实验室
通讯作者ya.cheng@siom.ac.cn
作者单位中国科学院上海光学精密机械研究所
推荐引用方式
GB/T 7714
Tan, Yuanxin,Wang, Zhaohui,Chu, Wei,et al. High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions[J]. Opt. Mater. Express,2016,6(12):3787.
APA Tan, Yuanxin.,Wang, Zhaohui.,Chu, Wei.,Liao, Yang.,Qiao, Lingling.,...&ya.cheng@siom.ac.cn.(2016).High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions.Opt. Mater. Express,6(12),3787.
MLA Tan, Yuanxin,et al."High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions".Opt. Mater. Express 6.12(2016):3787.
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