SIOM OpenIR  > 信息光学与光电技术实验室
Wavefront aberration measurement method for a hyper-NA lithographic projection lens based on principal component analysis of an aerial image
Zhu, Boer; Wang, Xiangzhao; Li, Sikun; Yan, Guanyong; Shen, Lina; Duan, Lifeng; wxz26267@siom.ac.cn
2016
Source PublicationAppl. Optics
Volume55Issue:12Pages:3192
AbstractA wavefront aberration measurement method for a hyper-NA lithographic projection lens by use of an aerial image based on principal component analysis is proposed. Aerial images of the hyper-NA lithographic projection lens are expressed accurately by using polarized light and a vector imaging model, as well as by considering the polarization properties. As a result, the wavefront aberrations of the hyper-NA lithographic projection lens are measured accurately. The lithographic simulator PROLITH is used to validate the accuracies of the wavefront aberration measurement and analyze the impact of the polarization rotation of illumination on the accuracy of the wavefront aberration measurement, as well as the degree of polarized light and the sample interval of aerial images. The result shows that the proposed method can retrieve 33 terms of Zernike coefficients (Z(5) - Z(37)) with a maximum error of less than 0.00085 lambda. (C) 2016 Optical Society of America
SubtypeArticle
Department信息光电
DOI10.1364/AO.55.003192
Funding OrganizationNational Natural Science Foundation of China (NSFC) [61205102, 61275207, 61405210, 61474129] ; National Natural Science Foundation of China (NSFC) [61205102, 61275207, 61405210, 61474129] ; National Natural Science Foundation of China (NSFC) [61205102, 61275207, 61405210, 61474129] ; National Natural Science Foundation of China (NSFC) [61205102, 61275207, 61405210, 61474129]
Indexed BySCI
Funding OrganizationNational Natural Science Foundation of China (NSFC) [61205102, 61275207, 61405210, 61474129] ; National Natural Science Foundation of China (NSFC) [61205102, 61275207, 61405210, 61474129] ; National Natural Science Foundation of China (NSFC) [61205102, 61275207, 61405210, 61474129] ; National Natural Science Foundation of China (NSFC) [61205102, 61275207, 61405210, 61474129]
WOS IDWOS:000374388600043
Citation statistics
Cited Times:3[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.siom.ac.cn/handle/181231/28534
Collection信息光学与光电技术实验室
Corresponding Authorwxz26267@siom.ac.cn
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
Zhu, Boer,Wang, Xiangzhao,Li, Sikun,et al. Wavefront aberration measurement method for a hyper-NA lithographic projection lens based on principal component analysis of an aerial image[J]. Appl. Optics,2016,55(12):3192.
APA Zhu, Boer.,Wang, Xiangzhao.,Li, Sikun.,Yan, Guanyong.,Shen, Lina.,...&wxz26267@siom.ac.cn.(2016).Wavefront aberration measurement method for a hyper-NA lithographic projection lens based on principal component analysis of an aerial image.Appl. Optics,55(12),3192.
MLA Zhu, Boer,et al."Wavefront aberration measurement method for a hyper-NA lithographic projection lens based on principal component analysis of an aerial image".Appl. Optics 55.12(2016):3192.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Zhu, Boer]'s Articles
[Wang, Xiangzhao]'s Articles
[Li, Sikun]'s Articles
Baidu academic
Similar articles in Baidu academic
[Zhu, Boer]'s Articles
[Wang, Xiangzhao]'s Articles
[Li, Sikun]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Zhu, Boer]'s Articles
[Wang, Xiangzhao]'s Articles
[Li, Sikun]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.