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Two-degree-freedom displacement measurement based on a short period grating in symmetric Littrow configuration
Lu, Yancong; Wei, Chunlong; Jia, Wei; Li, Shubin; Yu, Junjie; Li, Minkang; Xiang, Changcheng; Xiang, Xiansong; Wang, Jin; Ma, Jianyong; Zhou, Changhe; chazhou@mail.shcnc.ac.cn
2016
发表期刊Opt. Commun.
卷号380页码:382
摘要An optical encoder based on symmetric Littrow configuration is presented. Although the grating is one dimensional, both horizontal and vertical displacement can be measured simultaneously. The angle between grating vector and horizontal movement is taken into account in the measurement results, which not only decreases the requirement of installation but also decreases the cosine error. Thanks to the short grating period of 561.8 nm, a high resolution of 0.137 nm is obtained. The measurement results of optical encoder are compared with that of commercial laser interferometer. The coincident results demonstrate that the encoder should be a useful optical measurement device for detecting two-dimensional movement. (C) 2016 Published by Elsevier B.V.
文章类型Article
部门归属信息光电
DOI10.1016/j.optcom.2016.06.016
资助者National Natural Science Foundation of China (NSFC) [61405214, 61308077, 61127013] ; National Natural Science Foundation of China (NSFC) [61405214, 61308077, 61127013] ; National Natural Science Foundation of China (NSFC) [61405214, 61308077, 61127013] ; National Natural Science Foundation of China (NSFC) [61405214, 61308077, 61127013]
收录类别SCI
资助者National Natural Science Foundation of China (NSFC) [61405214, 61308077, 61127013] ; National Natural Science Foundation of China (NSFC) [61405214, 61308077, 61127013] ; National Natural Science Foundation of China (NSFC) [61405214, 61308077, 61127013] ; National Natural Science Foundation of China (NSFC) [61405214, 61308077, 61127013]
WOS记录号WOS:000382793800056
引用统计
文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28531
专题信息光学与光电技术实验室
通讯作者chazhou@mail.shcnc.ac.cn
作者单位中国科学院上海光学精密机械研究所
推荐引用方式
GB/T 7714
Lu, Yancong,Wei, Chunlong,Jia, Wei,et al. Two-degree-freedom displacement measurement based on a short period grating in symmetric Littrow configuration[J]. Opt. Commun.,2016,380:382.
APA Lu, Yancong.,Wei, Chunlong.,Jia, Wei.,Li, Shubin.,Yu, Junjie.,...&chazhou@mail.shcnc.ac.cn.(2016).Two-degree-freedom displacement measurement based on a short period grating in symmetric Littrow configuration.Opt. Commun.,380,382.
MLA Lu, Yancong,et al."Two-degree-freedom displacement measurement based on a short period grating in symmetric Littrow configuration".Opt. Commun. 380(2016):382.
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