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Pitch evaluation of gratings based on a digital image correlation technique
Lu, Yancong; Jia, Wei; Wei, Chunlong; Yu, Junjie; Li, Shubin; Li, Yanyang; Li, Minkang; Qiu, Jucheng; Wang, Shaoqing; Zhou, Changhe; chazhou@mail.shcnc.ac.cn
2016
发表期刊Opt. Commun.
卷号365页码:68
摘要The digital image correlation (DIC) technique used for metrological grating evaluation is presented in this paper. A CCD camera is used to acquire the grating image, and the DIC technique together with the peak position detection method is used to evaluate the grating pitches. The theoretical analysis and simulations are performed to confirm that the performance of our technique is as accurate as the Fourier transform (Fr) technique, and is capable of noise resistance. As an example, the uniformity of the grating fabricated in our laboratory is measured using this method. The experimental results show that this grating has a peak-to-valley uniformity of 48 nm during a long range of 35 mm, and our technique has a higher repeatability than the FT technique in our measurement strategy. This work should be of great significance for the evaluation of metrological grating for optical encoders. (C) 2015 Elsevier B.V. All rights reserved.
文章类型Article
部门归属信息光电
DOI10.1016/j.optcom.2015.11.069
资助者National Science Foundation (NSF) [61127013, 61405214, 61308073] ; National Science Foundation (NSF) [61127013, 61405214, 61308073] ; National Science Foundation (NSF) [61127013, 61405214, 61308073] ; National Science Foundation (NSF) [61127013, 61405214, 61308073]
收录类别SCI
资助者National Science Foundation (NSF) [61127013, 61405214, 61308073] ; National Science Foundation (NSF) [61127013, 61405214, 61308073] ; National Science Foundation (NSF) [61127013, 61405214, 61308073] ; National Science Foundation (NSF) [61127013, 61405214, 61308073]
WOS记录号WOS:000369233100012
引用统计
文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28516
专题信息光学与光电技术实验室
通讯作者chazhou@mail.shcnc.ac.cn
作者单位中国科学院上海光学精密机械研究所
推荐引用方式
GB/T 7714
Lu, Yancong,Jia, Wei,Wei, Chunlong,et al. Pitch evaluation of gratings based on a digital image correlation technique[J]. Opt. Commun.,2016,365:68.
APA Lu, Yancong.,Jia, Wei.,Wei, Chunlong.,Yu, Junjie.,Li, Shubin.,...&chazhou@mail.shcnc.ac.cn.(2016).Pitch evaluation of gratings based on a digital image correlation technique.Opt. Commun.,365,68.
MLA Lu, Yancong,et al."Pitch evaluation of gratings based on a digital image correlation technique".Opt. Commun. 365(2016):68.
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