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Measurement precision improvement for excimer laser pulse energy sensor based on a special finite impulse response filter
Xie, Chengke; Chen, Ming; Zhu, Jing; Yang, Baoxi; Huang, Huijie; xchke@126.com
2017
发表期刊J. Opt. Technol.
卷号84期号:5页码:346
摘要In deep ultraviolet lithographic tools, precise measurement of excimer laser pulse energy is essential. However, system noise of the energy sensor, which is used to monitor the laser pulse during exposure dose control, complicate pulse energy measurement. To improve measurement precision, a specific finite impulse response filter is proposed for signal denoising. Particularly, the convolution kernel of the specific finite impulse response filter is derived from the nonlinear fitting of the energy sensor output. Experimental results show that the measurement precision of the energy sensor improves 2-3 times with the specific finite impulse response filter. To verify the effectiveness of the energy sensor, it is used for transmittance measurement; the measurement result of a Corning 7980 witness sample is consistent with that measured by a commercial ultraviolet spectrophotometer and the measurement accuracy is 0.11% (k = 2).
文章类型Article
部门归属信息光电
DOI10.1364/JOT.84.000346
收录类别SCI
WOS记录号WOS:000408267400010
引用统计
文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28503
专题信息光学与光电技术实验室
通讯作者xchke@126.com
作者单位中国科学院上海光学精密机械研究所
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GB/T 7714
Xie, Chengke,Chen, Ming,Zhu, Jing,et al. Measurement precision improvement for excimer laser pulse energy sensor based on a special finite impulse response filter[J]. J. Opt. Technol.,2017,84(5):346.
APA Xie, Chengke,Chen, Ming,Zhu, Jing,Yang, Baoxi,Huang, Huijie,&xchke@126.com.(2017).Measurement precision improvement for excimer laser pulse energy sensor based on a special finite impulse response filter.J. Opt. Technol.,84(5),346.
MLA Xie, Chengke,et al."Measurement precision improvement for excimer laser pulse energy sensor based on a special finite impulse response filter".J. Opt. Technol. 84.5(2017):346.
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