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General analytical expressions for the impact of polarization aberration on lithographic imaging under linearly polarized illumination
Shen, Lina; Wang, Xiangzhao; Li, Sikun; Yan, Guanyong; Zhu, Boer; Zhang, Heng; wxz26267@siom.ac.cn
2016
发表期刊J. Opt. Soc. Am. A-Opt. Image Sci. Vis.
卷号33期号:6页码:1112
摘要With the shrinking of the critical dimension, the impact of polarization aberration on lithographic imaging becomes increasingly prominent. In this paper, the linear relationships between the image placement error and odd Pauli-Zernike polarization aberrations, as well as those between the best focus shift and even Pauli-Zernike polarization aberrations, are established by analyzing the imaging of the alternating phase-shifting mask. The relational expressions of the polarization aberration sensitivities ( PAS) and the polarization angle of illumination are obtained based on these linear relationships. Then the expressions for the zero-value points and extremum points of the PAS are derived, and the impact of the polarization angle of illumination on the PAS is analyzed. The derived analytical expressions match the simulation results well; these can be used to analyze the detrimental impact of polarization aberration on lithographic imaging and provide a theoretical basis for exploring polarization aberration measurement and control techniques. (C)2016 Optical Society of America
文章类型Article
部门归属信息光电
DOI10.1364/JOSAA.33.001112
资助者National Natural Science Foundation of China (NSFC) [61275207, 61205102, 61474129, 61405210] ; National Natural Science Foundation of China (NSFC) [61275207, 61205102, 61474129, 61405210] ; National Natural Science Foundation of China (NSFC) [61275207, 61205102, 61474129, 61405210] ; National Natural Science Foundation of China (NSFC) [61275207, 61205102, 61474129, 61405210]
收录类别SCI
资助者National Natural Science Foundation of China (NSFC) [61275207, 61205102, 61474129, 61405210] ; National Natural Science Foundation of China (NSFC) [61275207, 61205102, 61474129, 61405210] ; National Natural Science Foundation of China (NSFC) [61275207, 61205102, 61474129, 61405210] ; National Natural Science Foundation of China (NSFC) [61275207, 61205102, 61474129, 61405210]
WOS记录号WOS:000377513300013
引用统计
文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28495
专题信息光学与光电技术实验室
通讯作者wxz26267@siom.ac.cn
作者单位中国科学院上海光学精密机械研究所
推荐引用方式
GB/T 7714
Shen, Lina,Wang, Xiangzhao,Li, Sikun,et al. General analytical expressions for the impact of polarization aberration on lithographic imaging under linearly polarized illumination[J]. J. Opt. Soc. Am. A-Opt. Image Sci. Vis.,2016,33(6):1112.
APA Shen, Lina.,Wang, Xiangzhao.,Li, Sikun.,Yan, Guanyong.,Zhu, Boer.,...&wxz26267@siom.ac.cn.(2016).General analytical expressions for the impact of polarization aberration on lithographic imaging under linearly polarized illumination.J. Opt. Soc. Am. A-Opt. Image Sci. Vis.,33(6),1112.
MLA Shen, Lina,et al."General analytical expressions for the impact of polarization aberration on lithographic imaging under linearly polarized illumination".J. Opt. Soc. Am. A-Opt. Image Sci. Vis. 33.6(2016):1112.
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