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Flat Gauss illumination for the step-and-scan lithographic system
Chen, Ming; Wang, Ying; Zeng, Aijun; Zhu, Jing; Yang, Baoxi; Huang, Huijie; aijunzeng@siom.ac.cn
2016
发表期刊Opt. Commun.
卷号372页码:201
摘要To meet the uniform dose exposure in optical lithography, it is desirable to get uniform illumination in the scanning direction on wafer for the step-and-scan lithographic system. We present a flat Gauss illumination for the step-and-scan lithographic system in this paper. Through flat Gauss illumination in scanning direction, pulse quantization effect could be reduced effectively. Correspondingly, the uniformity of the reticle and wafer is improved. Compared with the trapezoid illumination, flat Gauss illumination could keep the slit edge fixed, and pulse quantization effect will not be enhanced. Moreover flat Gauss illumination could be obtained directly without defocusing and blocking, which results in high energy efficiency and high throughput of the lithography. A design strategy for flat Gauss illumination is also proposed which offers high uniformity illumination, fixed slope and integral energy of flat Gauss illumination in different coherence factors. The strategy describes a light uniform device which contains first microlens array, second microlens array, one-dimensional Gauss diffuser and a Fourier lens. The device produces flat Gauss illumination directly at the scanning slit. The design and simulation results show that the uniformity of flat Gauss illumination in two directions satisfy the requirements of lithographic illumination system and the slope. In addition, slit edge of flat Gauss illumination does not change. (C) 2016 Published by Elsevier B.V.
文章类型Article
部门归属信息光电
DOI10.1016/j.optcom.2016.04.033
资助者International Science & Technology Cooperation Programs of China [2011DFR10010, 2012DFG51590]; Science and Technology Commission of Shanghai Municipality [14YF1406300]; National Science and Technology Major Project of China [2011ZX02402] ; International Science & Technology Cooperation Programs of China [2011DFR10010, 2012DFG51590]; Science and Technology Commission of Shanghai Municipality [14YF1406300]; National Science and Technology Major Project of China [2011ZX02402] ; International Science & Technology Cooperation Programs of China [2011DFR10010, 2012DFG51590]; Science and Technology Commission of Shanghai Municipality [14YF1406300]; National Science and Technology Major Project of China [2011ZX02402] ; International Science & Technology Cooperation Programs of China [2011DFR10010, 2012DFG51590]; Science and Technology Commission of Shanghai Municipality [14YF1406300]; National Science and Technology Major Project of China [2011ZX02402]
收录类别SCI
资助者International Science & Technology Cooperation Programs of China [2011DFR10010, 2012DFG51590]; Science and Technology Commission of Shanghai Municipality [14YF1406300]; National Science and Technology Major Project of China [2011ZX02402] ; International Science & Technology Cooperation Programs of China [2011DFR10010, 2012DFG51590]; Science and Technology Commission of Shanghai Municipality [14YF1406300]; National Science and Technology Major Project of China [2011ZX02402] ; International Science & Technology Cooperation Programs of China [2011DFR10010, 2012DFG51590]; Science and Technology Commission of Shanghai Municipality [14YF1406300]; National Science and Technology Major Project of China [2011ZX02402] ; International Science & Technology Cooperation Programs of China [2011DFR10010, 2012DFG51590]; Science and Technology Commission of Shanghai Municipality [14YF1406300]; National Science and Technology Major Project of China [2011ZX02402]
WOS记录号WOS:000375424000031
引用统计
被引频次:3[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28494
专题信息光学与光电技术实验室
通讯作者aijunzeng@siom.ac.cn
作者单位中国科学院上海光学精密机械研究所
推荐引用方式
GB/T 7714
Chen, Ming,Wang, Ying,Zeng, Aijun,et al. Flat Gauss illumination for the step-and-scan lithographic system[J]. Opt. Commun.,2016,372:201.
APA Chen, Ming.,Wang, Ying.,Zeng, Aijun.,Zhu, Jing.,Yang, Baoxi.,...&aijunzeng@siom.ac.cn.(2016).Flat Gauss illumination for the step-and-scan lithographic system.Opt. Commun.,372,201.
MLA Chen, Ming,et al."Flat Gauss illumination for the step-and-scan lithographic system".Opt. Commun. 372(2016):201.
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