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Development of Device for High-Precision Deep Ultraviolet Optical Transmittance Measurement
Chen M(陈明); Xie CK(谢承科); Yang BX(杨宝喜); Huang HJ(黄惠杰); chenming@siom.ac.cn; huanghuijie@siom.ac.cn
2016
发表期刊中国激光
卷号43期号:3页码:308002
摘要In order to accurately control the exposure dose, it is necessary to measure optical transmittance of lithography system accurately. A doublecontrast method of optical transmittance measurement is introduced. It effectively eliminates the measurement error caused by an excimer laser energy fluctuation. In order to eliminate the measurement errors caused by diversification of excimer laser polarization, a polarizer is used in this equipment. The experimental setup is designed to measure the transmittance of an optical sample whose transmittance can be calculated accurately. The experimental results show that measurement results are consistent with theoretical calculations and the repeatability of measurement is less than 0.3%. The transmittance of optical sample is measured by the spectrophotometer, and the difference between the two kinds of equipment is 0.28%. Furthermore, the equipment has flexible application for transmittance measurement of optical system and advantage for not influenced by optical sample sizes.
文章类型Article
其他摘要为了精确控制曝光剂量,需要精确测量光刻系统的光学透射率。采用了双光路对比的方法进行透射率测量,有效地消除了准分子激光器能量波动带来的透射率测量误差。并通过加入起偏器,消除了准分子激光器偏振态不稳定带来的误差。搭建了深紫外光学透射率测量装置,对1片可计算透射率的光学样品进行透射率测量,其测量结果与透射率理论计算结果基本一致。测量结果显示,该装置的测量重复性可达到0.3%。通过分光光度计对该光学样品进行测量,通过结果对比,该装置的测量结果与分光光度计的测量结果相差0.28%。另外,该装置应用灵活,可以测量光学
部门归属信息光电
DOI10.3788/CJL201643.0308002
收录类别CSCD
WOS记录号CSCD:5665572
CSCD记录号CSCD:5665572
引用统计
文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28486
专题信息光学与光电技术实验室
通讯作者chenming@siom.ac.cn; huanghuijie@siom.ac.cn
作者单位中国科学院上海光学精密机械研究所
推荐引用方式
GB/T 7714
Chen M,Xie CK,Yang BX,et al. Development of Device for High-Precision Deep Ultraviolet Optical Transmittance Measurement[J]. 中国激光,2016,43(3):308002.
APA 陈明,谢承科,杨宝喜,黄惠杰,chenming@siom.ac.cn,&huanghuijie@siom.ac.cn.(2016).Development of Device for High-Precision Deep Ultraviolet Optical Transmittance Measurement.中国激光,43(3),308002.
MLA 陈明,et al."Development of Device for High-Precision Deep Ultraviolet Optical Transmittance Measurement".中国激光 43.3(2016):308002.
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