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Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp
Yuan, Zhijun; Zhang, Haibo; Ye, Ren; Zhou, Jun; Wei, Yunrong; Lou, Qihong; junzhousd@siom.ac.cn
2017
发表期刊Chin. Opt. Lett.
卷号15期号:7
摘要Accurate and precise wavelength controlling of narrowband excimer lasers is essential for the lithography of an integrated circuit. High-precision wavelength tuning and calibration of a line-narrowed ArF laser are presented in this work. The laser spectrum is narrowed to a sub-picometer with a line narrowing system. Absolute wavelength calibration of the line-narrowed laser is performed based on the optogalvanic (OG) effect using iron hollow cathode discharge (HCD). An sccuracy of better than 0.1 pm for wavelength tuning and calibration is achieved with our homemade wavemeter.
文章类型Article
部门归属空间
DOI10.3788/COL201715.071402
资助者National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] ; National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] ; National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] ; National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202]
收录类别SCI
资助者National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] ; National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] ; National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] ; National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202]
WOS记录号WOS:000405355000012
引用统计
文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28449
专题空间激光信息技术研究中心
通讯作者junzhousd@siom.ac.cn
作者单位中国科学院上海光学精密机械研究所
推荐引用方式
GB/T 7714
Yuan, Zhijun,Zhang, Haibo,Ye, Ren,et al. Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp[J]. Chin. Opt. Lett.,2017,15(7).
APA Yuan, Zhijun.,Zhang, Haibo.,Ye, Ren.,Zhou, Jun.,Wei, Yunrong.,...&junzhousd@siom.ac.cn.(2017).Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp.Chin. Opt. Lett.,15(7).
MLA Yuan, Zhijun,et al."Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp".Chin. Opt. Lett. 15.7(2017).
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