KMS Shanghai Institute of Optics and Fine Mechanics, CAS
| Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp | |
| Yuan, Zhijun; Zhang, Haibo; Ye, Ren; Zhou, Jun; Wei, Yunrong; Lou, Qihong; junzhousd@siom.ac.cn | |
| 2017 | |
| Source Publication | Chin. Opt. Lett.
 |
| Volume | 15Issue:7 |
| Abstract | Accurate and precise wavelength controlling of narrowband excimer lasers is essential for the lithography of an integrated circuit. High-precision wavelength tuning and calibration of a line-narrowed ArF laser are presented in this work. The laser spectrum is narrowed to a sub-picometer with a line narrowing system. Absolute wavelength calibration of the line-narrowed laser is performed based on the optogalvanic (OG) effect using iron hollow cathode discharge (HCD). An sccuracy of better than 0.1 pm for wavelength tuning and calibration is achieved with our homemade wavemeter. |
| Subtype | Article |
| Department | 空间 |
| DOI | 10.3788/COL201715.071402 |
| Funding Organization | National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] ; National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] ; National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] ; National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] |
| Indexed By | SCI |
| Funding Organization | National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] ; National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] ; National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] ; National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] |
| WOS ID | WOS:000405355000012 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.siom.ac.cn/handle/181231/28449 |
| Collection | 空间激光信息技术研究中心 |
| Corresponding Author | junzhousd@siom.ac.cn |
| Affiliation | 中国科学院上海光学精密机械研究所 |
| Recommended Citation GB/T 7714 | Yuan, Zhijun,Zhang, Haibo,Ye, Ren,et al. Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp[J]. Chin. Opt. Lett.,2017,15(7). |
| APA | Yuan, Zhijun.,Zhang, Haibo.,Ye, Ren.,Zhou, Jun.,Wei, Yunrong.,...&junzhousd@siom.ac.cn.(2017).Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp.Chin. Opt. Lett.,15(7). |
| MLA | Yuan, Zhijun,et al."Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp".Chin. Opt. Lett. 15.7(2017). |
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