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Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp
Yuan, Zhijun; Zhang, Haibo; Ye, Ren; Zhou, Jun; Wei, Yunrong; Lou, Qihong; junzhousd@siom.ac.cn
2017
Source PublicationChin. Opt. Lett.
Volume15Issue:7
AbstractAccurate and precise wavelength controlling of narrowband excimer lasers is essential for the lithography of an integrated circuit. High-precision wavelength tuning and calibration of a line-narrowed ArF laser are presented in this work. The laser spectrum is narrowed to a sub-picometer with a line narrowing system. Absolute wavelength calibration of the line-narrowed laser is performed based on the optogalvanic (OG) effect using iron hollow cathode discharge (HCD). An sccuracy of better than 0.1 pm for wavelength tuning and calibration is achieved with our homemade wavemeter.
SubtypeArticle
Department空间
DOI10.3788/COL201715.071402
Funding OrganizationNational Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] ; National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] ; National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] ; National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202]
Indexed BySCI
Funding OrganizationNational Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] ; National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] ; National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202] ; National Science and Technology Major Project [2013ZX02202003]; National Key Research and Development Program [2016YFB0402201]; K. C. Wong Education Foundation; Program of Shanghai Technology Research Leader [17XD1424800]; Shanghai Sailing Program of Talented Youth in Science and Technology [17YF1421200]; Key Technologies R&D Program of Jiangsu [BE2014001, BE2016005-4]; Natural Science Foundation of Shanghai [16ZR1440100, 16ZR1440200]; NSAF Foundation of National Natural Science Foundation of China [U1330134, 61405202]
WOS IDWOS:000405355000012
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Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.siom.ac.cn/handle/181231/28449
Collection空间激光信息技术研究中心
Corresponding Authorjunzhousd@siom.ac.cn
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
Yuan, Zhijun,Zhang, Haibo,Ye, Ren,et al. Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp[J]. Chin. Opt. Lett.,2017,15(7).
APA Yuan, Zhijun.,Zhang, Haibo.,Ye, Ren.,Zhou, Jun.,Wei, Yunrong.,...&junzhousd@siom.ac.cn.(2017).Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp.Chin. Opt. Lett.,15(7).
MLA Yuan, Zhijun,et al."Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp".Chin. Opt. Lett. 15.7(2017).
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