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Characterization and FDTD simulation analysis on light trapping structures of amorphous silicon thin films by laser irradiation
Huang, Lu; Jin, Jing; Yuan, Zhijun; Yang, Weiguang; Wang, Linjun; Shi, Weimin; Zhou, Jun; Lou, Qihong; lhuang@shu.edu.cn
2016
发表期刊Superlattices Microstruct.
卷号93页码:290
摘要The effect of laser energy density on the light-trapping structures of amorphous silicon (alpha-Si) thin films is studied both theoretically and experimentally. The thin films are irradiated by a frequency-doubled (lambda = 532 nm) Nd:YAG pulsed nanosecond laser. An effective finite difference time domain (FDTD) model is built to find the optimized laser energy density (E-L) for the light trapping structures of alpha-Si. Based on the simulation analysis, it shows the variation of reflection spectra with laser energy density. The optimized reflection spectra at E-L = 1000 mJ/cm(2) measured by UV-visible spectroscopy confirms to agree well with that corresponding to the depth to diameter ratio (h/D) in the FDTD simulation. The surface morphology characterization by optical microscope (OM) and scanning electron microscope (SEM) accords fairly well to of light-trapping modeling in the simulation. (C) 2016 Elsevier Ltd. All rights reserved.
文章类型Article
部门归属空间
DOI10.1016/j.spmi.2016.03.037
资助者National Science Foundation of China [61404080, 51202139] ; National Science Foundation of China [61404080, 51202139] ; National Science Foundation of China [61404080, 51202139] ; National Science Foundation of China [61404080, 51202139]
收录类别SCI
资助者National Science Foundation of China [61404080, 51202139] ; National Science Foundation of China [61404080, 51202139] ; National Science Foundation of China [61404080, 51202139] ; National Science Foundation of China [61404080, 51202139]
WOS记录号WOS:000376213000034
引用统计
文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28364
专题空间激光信息技术研究中心
通讯作者lhuang@shu.edu.cn
作者单位中国科学院上海光学精密机械研究所
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Huang, Lu,Jin, Jing,Yuan, Zhijun,et al. Characterization and FDTD simulation analysis on light trapping structures of amorphous silicon thin films by laser irradiation[J]. Superlattices Microstruct.,2016,93:290.
APA Huang, Lu.,Jin, Jing.,Yuan, Zhijun.,Yang, Weiguang.,Wang, Linjun.,...&lhuang@shu.edu.cn.(2016).Characterization and FDTD simulation analysis on light trapping structures of amorphous silicon thin films by laser irradiation.Superlattices Microstruct.,93,290.
MLA Huang, Lu,et al."Characterization and FDTD simulation analysis on light trapping structures of amorphous silicon thin films by laser irradiation".Superlattices Microstruct. 93(2016):290.
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