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Nanoscale-resolved patterning on metal hydrazone complex thin films using diode-based maskless laser writing in the visible light regime
Zhang, Kui; Chen, Zhimin; Geng, Yongyou; Wang, Yang; Wu, Yiqun; yqwu@siom.ac.cn
2016
发表期刊Chin. Opt. Lett.
卷号14期号:5
摘要Metal hydrazone complex thin films are used as laser patterning materials, and the patterns with a minimum resolution of about 78 nm are successfully obtained by the laser writing setup (lambda = 405 nm, NA = 0.9). The minimum resolution is only about 1/8 of the writing spot size. In the formation of patterns, there is only a single step for forming patterns by the laser heating-induced clear thermal gasification threshold effect without any other development processes such as wet etching. This work provides an effective method for directly achieving nanoscale-resolved pattern structures with diode-based maskless laser writing lithography at visible light wavelengths.
文章类型Article
部门归属存储
DOI10.3788/COL201614.051401
资助者National Natural Science Foundation of China [61137002, 61178059, 51172253] ; National Natural Science Foundation of China [61137002, 61178059, 51172253] ; National Natural Science Foundation of China [61137002, 61178059, 51172253] ; National Natural Science Foundation of China [61137002, 61178059, 51172253]
收录类别SCI
资助者National Natural Science Foundation of China [61137002, 61178059, 51172253] ; National Natural Science Foundation of China [61137002, 61178059, 51172253] ; National Natural Science Foundation of China [61137002, 61178059, 51172253] ; National Natural Science Foundation of China [61137002, 61178059, 51172253]
WOS记录号WOS:000375921000011
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被引频次:4[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28244
专题高密度光存储技术实验室
通讯作者yqwu@siom.ac.cn
作者单位中国科学院上海光学精密机械研究所
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GB/T 7714
Zhang, Kui,Chen, Zhimin,Geng, Yongyou,et al. Nanoscale-resolved patterning on metal hydrazone complex thin films using diode-based maskless laser writing in the visible light regime[J]. Chin. Opt. Lett.,2016,14(5).
APA Zhang, Kui,Chen, Zhimin,Geng, Yongyou,Wang, Yang,Wu, Yiqun,&yqwu@siom.ac.cn.(2016).Nanoscale-resolved patterning on metal hydrazone complex thin films using diode-based maskless laser writing in the visible light regime.Chin. Opt. Lett.,14(5).
MLA Zhang, Kui,et al."Nanoscale-resolved patterning on metal hydrazone complex thin films using diode-based maskless laser writing in the visible light regime".Chin. Opt. Lett. 14.5(2016).
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