Movement flatness error measurement based on an astigmatic method

doi:10.1364/AO.56.004347

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	Movement flatness error measurement based on an astigmatic method
	Liang, Xin; Bai, Zhen; Wei, Jingsong; weijingsong@siom.ac.cn
	2017
发表期刊	Appl. Optics
卷号	56 期号:15 页码:4347
摘要	The movement flatness error is one of the critical parameters of motorized stage performance. In this work, the measurement of the movement flatness error based on an astigmatic method is proposed, in which the focus error signal is detected and used to analyze the movement flatness error. The theoretical derivation and analysis are presented, and the experimental system is established accordingly. The experimental results indicate that our measurement method and established system exhibit an accuracy of less than +/- 100 nm. The movement flatness error of an x-y stepping motorized stage is measured using the established system, and the movement flatness error profile is mapped; it is determined that the maximum movement flatness error is within 1.3 mu m in our experiment. The proposed method is hence proven to be an effective way of measuring the movement flatness error of motorized stages. (C) 2017 Optical Society of America
文章类型	Article
部门归属	存储
DOI	10.1364/AO.56.004347
资助者	National Natural Science Foundation of China (NSFC) [51672292, 61627826] ; National Natural Science Foundation of China (NSFC) [51672292, 61627826] ; National Natural Science Foundation of China (NSFC) [51672292, 61627826] ; National Natural Science Foundation of China (NSFC) [51672292, 61627826]
收录类别	SCI
资助者	National Natural Science Foundation of China (NSFC) [51672292, 61627826] ; National Natural Science Foundation of China (NSFC) [51672292, 61627826] ; National Natural Science Foundation of China (NSFC) [51672292, 61627826] ; National Natural Science Foundation of China (NSFC) [51672292, 61627826]
WOS记录号	WOS:000401839000018
引用统计
文献类型	期刊论文
条目标识符	http://ir.siom.ac.cn/handle/181231/28243
专题	高密度光存储技术实验室
通讯作者	weijingsong@siom.ac.cn
作者单位	中国科学院上海光学精密机械研究所
推荐引用方式 GB/T 7714	Liang, Xin,Bai, Zhen,Wei, Jingsong,et al. Movement flatness error measurement based on an astigmatic method[J]. Appl. Optics,2017,56(15):4347.
APA	Liang, Xin,Bai, Zhen,Wei, Jingsong,&weijingsong@siom.ac.cn.(2017).Movement flatness error measurement based on an astigmatic method.Appl. Optics,56(15),4347.
MLA	Liang, Xin,et al."Movement flatness error measurement based on an astigmatic method".Appl. Optics 56.15(2017):4347.