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Movement flatness error measurement based on an astigmatic method
Liang, Xin; Bai, Zhen; Wei, Jingsong; weijingsong@siom.ac.cn
2017
Source PublicationAppl. Optics
Volume56Issue:15Pages:4347
AbstractThe movement flatness error is one of the critical parameters of motorized stage performance. In this work, the measurement of the movement flatness error based on an astigmatic method is proposed, in which the focus error signal is detected and used to analyze the movement flatness error. The theoretical derivation and analysis are presented, and the experimental system is established accordingly. The experimental results indicate that our measurement method and established system exhibit an accuracy of less than +/- 100 nm. The movement flatness error of an x-y stepping motorized stage is measured using the established system, and the movement flatness error profile is mapped; it is determined that the maximum movement flatness error is within 1.3 mu m in our experiment. The proposed method is hence proven to be an effective way of measuring the movement flatness error of motorized stages. (C) 2017 Optical Society of America
SubtypeArticle
Department存储
DOI10.1364/AO.56.004347
Funding OrganizationNational Natural Science Foundation of China (NSFC) [51672292, 61627826] ; National Natural Science Foundation of China (NSFC) [51672292, 61627826] ; National Natural Science Foundation of China (NSFC) [51672292, 61627826] ; National Natural Science Foundation of China (NSFC) [51672292, 61627826]
Indexed BySCI
Funding OrganizationNational Natural Science Foundation of China (NSFC) [51672292, 61627826] ; National Natural Science Foundation of China (NSFC) [51672292, 61627826] ; National Natural Science Foundation of China (NSFC) [51672292, 61627826] ; National Natural Science Foundation of China (NSFC) [51672292, 61627826]
WOS IDWOS:000401839000018
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Document Type期刊论文
Identifierhttp://ir.siom.ac.cn/handle/181231/28243
Collection高密度光存储技术实验室
Corresponding Authorweijingsong@siom.ac.cn
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
Liang, Xin,Bai, Zhen,Wei, Jingsong,et al. Movement flatness error measurement based on an astigmatic method[J]. Appl. Optics,2017,56(15):4347.
APA Liang, Xin,Bai, Zhen,Wei, Jingsong,&weijingsong@siom.ac.cn.(2017).Movement flatness error measurement based on an astigmatic method.Appl. Optics,56(15),4347.
MLA Liang, Xin,et al."Movement flatness error measurement based on an astigmatic method".Appl. Optics 56.15(2017):4347.
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