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High-speed maskless nanolithography with visible light based on photothermal localization
Wei, Jingsong; Zhang, Kui; Wei, Tao; Wang, Yang; Wu, Yiqun; Xiao, Mufei; weijingsong@siom.ac.cn
2017
发表期刊Sci Rep
卷号7
摘要High-speed maskless nanolithography is experimentally achieved on AgInSbTe thin films. The lithography was carried out in air at room temperature, with a GaN diode laser (lambda = 405 nm), and on a large sample disk of diameter 120 mm. The normal width of the written features measures 46 +/- 5 nm, about 1/12 of the diffraction allowed smallest light spot, and the lithography speed reaches 6 +/- 8 m/s, tens of times faster than traditional laser writing methods. The writing resolution is instantaneously tunable by adjusting the laser power. The reason behind the significant breakthrough in terms of writing resolution and speed is found as the concentration of light induced heat. Therefore, the heat spot is far smaller than the light spot, so does the size of the written features. Such a sharp focus of heat occurs only on the selected writing material, and the phenomenon is referred as the photothermal localization response. The physics behind the effect is explained and supported with numerical simulations.
文章类型Article
部门归属存储
DOI10.1038/srep43892
资助者National Natural Science Foundation of China [51672292, 61627826, 61137002]; PAPIIT-UNAM [IN100514]; UNAM ; National Natural Science Foundation of China [51672292, 61627826, 61137002]; PAPIIT-UNAM [IN100514]; UNAM ; National Natural Science Foundation of China [51672292, 61627826, 61137002]; PAPIIT-UNAM [IN100514]; UNAM ; National Natural Science Foundation of China [51672292, 61627826, 61137002]; PAPIIT-UNAM [IN100514]; UNAM
收录类别SCI
资助者National Natural Science Foundation of China [51672292, 61627826, 61137002]; PAPIIT-UNAM [IN100514]; UNAM ; National Natural Science Foundation of China [51672292, 61627826, 61137002]; PAPIIT-UNAM [IN100514]; UNAM ; National Natural Science Foundation of China [51672292, 61627826, 61137002]; PAPIIT-UNAM [IN100514]; UNAM ; National Natural Science Foundation of China [51672292, 61627826, 61137002]; PAPIIT-UNAM [IN100514]; UNAM
WOS记录号WOS:000395581600001
引用统计
被引频次:4[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28236
专题高密度光存储技术实验室
通讯作者weijingsong@siom.ac.cn
作者单位中国科学院上海光学精密机械研究所
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Wei, Jingsong,Zhang, Kui,Wei, Tao,et al. High-speed maskless nanolithography with visible light based on photothermal localization[J]. Sci Rep,2017,7.
APA Wei, Jingsong.,Zhang, Kui.,Wei, Tao.,Wang, Yang.,Wu, Yiqun.,...&weijingsong@siom.ac.cn.(2017).High-speed maskless nanolithography with visible light based on photothermal localization.Sci Rep,7.
MLA Wei, Jingsong,et al."High-speed maskless nanolithography with visible light based on photothermal localization".Sci Rep 7(2017).
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