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High-speed laser writing of arbitrary patterns in polar coordinate system
Bai, Zhen; Wei, Jingsong; Liang, Xin; Zhang, Kui; Wei, Tao; Wang, Rui; weijingsong@siom.ac.cn
2016
发表期刊Rev. Sci. Instrum.
卷号87期号:12
摘要In order to realize high-speed laser writing arbitrary patterns, we establish a set of high-speed polar coordinate laser writing system. Although the polar coordinate laser writing system is generally suitable for fabricating circular symmetric patterns, there are challenges when dealing with arbitrary patterns. Here, we propose an effective method to solve this problem by converting the pattern data from Cartesian coordinates to polar coordinates for high-speed laser writing of arbitrary patterns. Several types of arbitrary patterns are written on chalcogenide thin films with a minimum pattern linewidth of 700 +/- 70 nm and a maximum writing speed of approximately 10 m/s,which corresponds to more than 600 mm(2)/min at 1.0 mu m linewidth. This writing speed is ten times faster than that of the conventional x-y type Cartesian coordinate laser writing system. Published by AIP Publishing.
文章类型Article
部门归属存储
DOI10.1063/1.4973397
资助者National Natural Science Foundation of China [61627826, 51672292, 61137002] ; National Natural Science Foundation of China [61627826, 51672292, 61137002] ; National Natural Science Foundation of China [61627826, 51672292, 61137002] ; National Natural Science Foundation of China [61627826, 51672292, 61137002]
收录类别SCI
资助者National Natural Science Foundation of China [61627826, 51672292, 61137002] ; National Natural Science Foundation of China [61627826, 51672292, 61137002] ; National Natural Science Foundation of China [61627826, 51672292, 61137002] ; National Natural Science Foundation of China [61627826, 51672292, 61137002]
WOS记录号WOS:000392096800073
引用统计
文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28235
专题高密度光存储技术实验室
通讯作者weijingsong@siom.ac.cn
作者单位中国科学院上海光学精密机械研究所
推荐引用方式
GB/T 7714
Bai, Zhen,Wei, Jingsong,Liang, Xin,et al. High-speed laser writing of arbitrary patterns in polar coordinate system[J]. Rev. Sci. Instrum.,2016,87(12).
APA Bai, Zhen.,Wei, Jingsong.,Liang, Xin.,Zhang, Kui.,Wei, Tao.,...&weijingsong@siom.ac.cn.(2016).High-speed laser writing of arbitrary patterns in polar coordinate system.Rev. Sci. Instrum.,87(12).
MLA Bai, Zhen,et al."High-speed laser writing of arbitrary patterns in polar coordinate system".Rev. Sci. Instrum. 87.12(2016).
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