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High-speed laser writing of arbitrary patterns in polar coordinate system
Bai, Zhen; Wei, Jingsong; Liang, Xin; Zhang, Kui; Wei, Tao; Wang, Rui; weijingsong@siom.ac.cn
2016
Source PublicationRev. Sci. Instrum.
Volume87Issue:12
AbstractIn order to realize high-speed laser writing arbitrary patterns, we establish a set of high-speed polar coordinate laser writing system. Although the polar coordinate laser writing system is generally suitable for fabricating circular symmetric patterns, there are challenges when dealing with arbitrary patterns. Here, we propose an effective method to solve this problem by converting the pattern data from Cartesian coordinates to polar coordinates for high-speed laser writing of arbitrary patterns. Several types of arbitrary patterns are written on chalcogenide thin films with a minimum pattern linewidth of 700 +/- 70 nm and a maximum writing speed of approximately 10 m/s,which corresponds to more than 600 mm(2)/min at 1.0 mu m linewidth. This writing speed is ten times faster than that of the conventional x-y type Cartesian coordinate laser writing system. Published by AIP Publishing.
SubtypeArticle
Department存储
DOI10.1063/1.4973397
Funding OrganizationNational Natural Science Foundation of China [61627826, 51672292, 61137002] ; National Natural Science Foundation of China [61627826, 51672292, 61137002] ; National Natural Science Foundation of China [61627826, 51672292, 61137002] ; National Natural Science Foundation of China [61627826, 51672292, 61137002]
Indexed BySCI
Funding OrganizationNational Natural Science Foundation of China [61627826, 51672292, 61137002] ; National Natural Science Foundation of China [61627826, 51672292, 61137002] ; National Natural Science Foundation of China [61627826, 51672292, 61137002] ; National Natural Science Foundation of China [61627826, 51672292, 61137002]
WOS IDWOS:000392096800073
Citation statistics
Document Type期刊论文
Identifierhttp://ir.siom.ac.cn/handle/181231/28235
Collection高密度光存储技术实验室
Corresponding Authorweijingsong@siom.ac.cn
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
Bai, Zhen,Wei, Jingsong,Liang, Xin,et al. High-speed laser writing of arbitrary patterns in polar coordinate system[J]. Rev. Sci. Instrum.,2016,87(12).
APA Bai, Zhen.,Wei, Jingsong.,Liang, Xin.,Zhang, Kui.,Wei, Tao.,...&weijingsong@siom.ac.cn.(2016).High-speed laser writing of arbitrary patterns in polar coordinate system.Rev. Sci. Instrum.,87(12).
MLA Bai, Zhen,et al."High-speed laser writing of arbitrary patterns in polar coordinate system".Rev. Sci. Instrum. 87.12(2016).
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