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A study on one-step laser nanopatterning onto copper-hydrazone-complex thin films and its mechanism
Zhang, Kui; Chen, Zhimin; Wei, Jingsong; Wei, Tao; Geng, Youyong; Wang, Yang; Wu, Yiqun; weijingsong@siom.ac.cn; yqwu@siom.ac.cn
2017
发表期刊Phys. Chem. Chem. Phys.
卷号19期号:20页码:13272
摘要Semiconductor diode-based laser patterning with visible light has been extensively applied to the fabrication of arbitrary structures. However, recently, the technique has faced a great challenge because it cannot meet nanoscale-resolved patterning fabrication due to the optical diffraction limit, which is an inherent drawback in the field of optics. To attack the question, copper(II)-hydrazone-complex (CuL2) thin films are used as laser patterning materials. Under the heating of a writing laser spot, one-step laser nanopatterning on the CuL2 thin films is obtained. The convex-type and concave-type pattern structures are directly written without wet-etching and developing processes. The minimum pattern feature size is about 31 nm, which is far smaller than the diffraction limit and only similar to 1/20 the writing spot size. Analysis indicates that the laser nanopatterning originates from obvious photothermal localization responses to the writing spot. Compared with common organic resists, the exposure dose of CuL2 is several orders higher than that of the polymer; thus CuL2 thin film materials are suitable for maskless direct laser writing lithography. This work also provides an effective method for one-step nanopatternings through diode-based laser writing at visible light wavelengths.
文章类型Article
部门归属存储
DOI10.1039/c7cp00477j
资助者National Natural Science Foundation of China [51672292, 61627826, 61137002] ; National Natural Science Foundation of China [51672292, 61627826, 61137002] ; National Natural Science Foundation of China [51672292, 61627826, 61137002] ; National Natural Science Foundation of China [51672292, 61627826, 61137002]
收录类别SCI
资助者National Natural Science Foundation of China [51672292, 61627826, 61137002] ; National Natural Science Foundation of China [51672292, 61627826, 61137002] ; National Natural Science Foundation of China [51672292, 61627826, 61137002] ; National Natural Science Foundation of China [51672292, 61627826, 61137002]
WOS记录号WOS:000402072100071
引用统计
被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28227
专题高密度光存储技术实验室
通讯作者weijingsong@siom.ac.cn; yqwu@siom.ac.cn
作者单位中国科学院上海光学精密机械研究所
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Zhang, Kui,Chen, Zhimin,Wei, Jingsong,et al. A study on one-step laser nanopatterning onto copper-hydrazone-complex thin films and its mechanism[J]. Phys. Chem. Chem. Phys.,2017,19(20):13272.
APA Zhang, Kui.,Chen, Zhimin.,Wei, Jingsong.,Wei, Tao.,Geng, Youyong.,...&yqwu@siom.ac.cn.(2017).A study on one-step laser nanopatterning onto copper-hydrazone-complex thin films and its mechanism.Phys. Chem. Chem. Phys.,19(20),13272.
MLA Zhang, Kui,et al."A study on one-step laser nanopatterning onto copper-hydrazone-complex thin films and its mechanism".Phys. Chem. Chem. Phys. 19.20(2017):13272.
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