SIOM OpenIR  > 中科院强激光材料重点实验室
Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials
Liu, Na; Wang, Feifei; Liu, Lianqing; Yu, Haibo; Xie, Shaorong; Wang, Jun; Wang, Yuechao; Lee, Gwo-Bin; Li, Wen J.; lqliu@sia.cn; wenjli@cityu.edu.hk
2016
Source PublicationSci Rep
Volume6
AbstractThe synthesis and assembly of components are key steps in micro/nano device manufacturing. In this article, we report an optically controlled assembly method that can rapidly pattern micro/nano devices by directly assembling ions and nanomaterials without expensive physical masks and complex etching processes. Utilizing this controllable process, different types of device components (e.g., metallic and semiconductor) can be fabricated and assembled in 10-30 seconds, which is far more rapid and cost-effective than any other micro/nano fabrication method.
SubtypeArticle
Department材料
DOI10.1038/srep32106
Funding OrganizationNational Natural Science Foundation of China [61302003, 61522312, 61178007, 61522510]; NSFC/RGC Joint Research Scheme [51461165501, N_CityU132/14]; Hong Kong Research Grants Council [CityU 118513]; CAS-FEA International Partnership Program for Creative Re ; National Natural Science Foundation of China [61302003, 61522312, 61178007, 61522510]; NSFC/RGC Joint Research Scheme [51461165501, N_CityU132/14]; Hong Kong Research Grants Council [CityU 118513]; CAS-FEA International Partnership Program for Creative Re ; National Natural Science Foundation of China [61302003, 61522312, 61178007, 61522510]; NSFC/RGC Joint Research Scheme [51461165501, N_CityU132/14]; Hong Kong Research Grants Council [CityU 118513]; CAS-FEA International Partnership Program for Creative Re ; National Natural Science Foundation of China [61302003, 61522312, 61178007, 61522510]; NSFC/RGC Joint Research Scheme [51461165501, N_CityU132/14]; Hong Kong Research Grants Council [CityU 118513]; CAS-FEA International Partnership Program for Creative Re
Indexed BySCI
Funding OrganizationNational Natural Science Foundation of China [61302003, 61522312, 61178007, 61522510]; NSFC/RGC Joint Research Scheme [51461165501, N_CityU132/14]; Hong Kong Research Grants Council [CityU 118513]; CAS-FEA International Partnership Program for Creative Re ; National Natural Science Foundation of China [61302003, 61522312, 61178007, 61522510]; NSFC/RGC Joint Research Scheme [51461165501, N_CityU132/14]; Hong Kong Research Grants Council [CityU 118513]; CAS-FEA International Partnership Program for Creative Re ; National Natural Science Foundation of China [61302003, 61522312, 61178007, 61522510]; NSFC/RGC Joint Research Scheme [51461165501, N_CityU132/14]; Hong Kong Research Grants Council [CityU 118513]; CAS-FEA International Partnership Program for Creative Re ; National Natural Science Foundation of China [61302003, 61522312, 61178007, 61522510]; NSFC/RGC Joint Research Scheme [51461165501, N_CityU132/14]; Hong Kong Research Grants Council [CityU 118513]; CAS-FEA International Partnership Program for Creative Re
WOS IDWOS:000381978200001
Citation statistics
Document Type期刊论文
Identifierhttp://ir.siom.ac.cn/handle/181231/28166
Collection中科院强激光材料重点实验室
Corresponding Authorlqliu@sia.cn; wenjli@cityu.edu.hk
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
Liu, Na,Wang, Feifei,Liu, Lianqing,et al. Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials[J]. Sci Rep,2016,6.
APA Liu, Na.,Wang, Feifei.,Liu, Lianqing.,Yu, Haibo.,Xie, Shaorong.,...&wenjli@cityu.edu.hk.(2016).Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials.Sci Rep,6.
MLA Liu, Na,et al."Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials".Sci Rep 6(2016).
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