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Origin of arbitrary patterns by direct laser writing in a telluride thin film
Wei, Tao; Wei, Jingsong; Zhang, Kui; Zhou, Qijun; Bai, Zhen; Liang, Xin; Li, Qisong; Ding, Chenliang; Wang, Yang; Zhang, Long; weijingsong@siom.ac.cn; lzhang@siom.ac.cn
2016
发表期刊RSC Adv.
卷号6期号:51页码:45748
摘要A crystalline telluride (Te) thin film was prepared by a radio frequency magnetron controlling sputtering method. The fabrication of arbitrary patterns was achieved successfully by our home-built direct laser writing system in the prepared Te thin film. To elucidate the mechanism of pattern formation, micro Xray diffraction, micro Raman spectra and micro reflective spectra before and after exposure were analyzed in detail. The results reveal that the occurrence of arbitrary patterns may be ascribed to the decreased grain size in the Te thin film, which can further be confirmed by the results of AFM and section images of the Te thin film. It is a simple and cost-effective method for arbitrary pattern fabrication based on the reduction of grain size in the laser writing process.
文章类型Article
部门归属材料
DOI10.1039/c5ra23627d
资助者National Natural Science Foundation of China [51172253, 61137002] ; National Natural Science Foundation of China [51172253, 61137002] ; National Natural Science Foundation of China [51172253, 61137002] ; National Natural Science Foundation of China [51172253, 61137002]
收录类别SCI
资助者National Natural Science Foundation of China [51172253, 61137002] ; National Natural Science Foundation of China [51172253, 61137002] ; National Natural Science Foundation of China [51172253, 61137002] ; National Natural Science Foundation of China [51172253, 61137002]
WOS记录号WOS:000376120100094
引用统计
文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28146
专题中科院强激光材料重点实验室
通讯作者weijingsong@siom.ac.cn; lzhang@siom.ac.cn
作者单位中国科学院上海光学精密机械研究所
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Wei, Tao,Wei, Jingsong,Zhang, Kui,et al. Origin of arbitrary patterns by direct laser writing in a telluride thin film[J]. RSC Adv.,2016,6(51):45748.
APA Wei, Tao.,Wei, Jingsong.,Zhang, Kui.,Zhou, Qijun.,Bai, Zhen.,...&lzhang@siom.ac.cn.(2016).Origin of arbitrary patterns by direct laser writing in a telluride thin film.RSC Adv.,6(51),45748.
MLA Wei, Tao,et al."Origin of arbitrary patterns by direct laser writing in a telluride thin film".RSC Adv. 6.51(2016):45748.
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