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Optical surfacing via linear ion source
Wu, Lixiang; Wei, Chaoyang; Shao, Jianda; wulx@hdu.edu.cn; siomwei@siom.ac.cn; jdshao@siom.ac.cn
2017
发表期刊Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms
卷号397页码:82
摘要We present a concept of surface decomposition extended from double Fourier series to nonnegative sinusoidal wave surfaces, on the basis of which linear ion sources apply to the ultra-precision fabrication of complex surfaces and diffractive optics. The modified Fourier series, or sinusoidal wave surfaces, build a relationship between the fabrication process of optical surfaces and the surface characterization based on power spectral density (PSD) analysis. Also, we demonstrate that the one-dimensional scanning of linear ion source is applicable to the removal of mid-spatial frequency (MSF) errors caused by small-tool polishing in raster scan mode as well as the fabrication of beam sampling grating of high diffractive uniformity without a post-processing procedure. The simulation results show that optical fabrication with linear ion source is feasible and even of higher output efficiency compared with the conventional approach. (C) 2017 Elsevier B.V. All rights reserved.
文章类型Article
部门归属材料
DOI10.1016/j.nimb.2017.03.005
资助者Youth Innovation Promotion Association of the Chinese Academy of Sciences ; Youth Innovation Promotion Association of the Chinese Academy of Sciences ; Youth Innovation Promotion Association of the Chinese Academy of Sciences ; Youth Innovation Promotion Association of the Chinese Academy of Sciences
收录类别SCI
资助者Youth Innovation Promotion Association of the Chinese Academy of Sciences ; Youth Innovation Promotion Association of the Chinese Academy of Sciences ; Youth Innovation Promotion Association of the Chinese Academy of Sciences ; Youth Innovation Promotion Association of the Chinese Academy of Sciences
WOS记录号WOS:000399627100012
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文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28143
专题中科院强激光材料重点实验室
通讯作者wulx@hdu.edu.cn; siomwei@siom.ac.cn; jdshao@siom.ac.cn
作者单位中国科学院上海光学精密机械研究所
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GB/T 7714
Wu, Lixiang,Wei, Chaoyang,Shao, Jianda,et al. Optical surfacing via linear ion source[J]. Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms,2017,397:82.
APA Wu, Lixiang,Wei, Chaoyang,Shao, Jianda,wulx@hdu.edu.cn,siomwei@siom.ac.cn,&jdshao@siom.ac.cn.(2017).Optical surfacing via linear ion source.Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms,397,82.
MLA Wu, Lixiang,et al."Optical surfacing via linear ion source".Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms 397(2017):82.
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