KMS Shanghai Institute of Optics and Fine Mechanics, CAS
Multilayer deformation planarization by substrate pit suturing | |
Chai, Yingjie; Zhu, Meiping; Xing, Huanbin; Wang, Hu; Cui, Yun; Shao, Jianda; bree@siom.ac.cn; jdshao@siom.ac.cn | |
2016 | |
Source Publication | Opt. Lett.
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Volume | 41Issue:15Pages:3403 |
Abstract | In the pursuit of 1064 nm high-power laser resistance dielectric coatings in the nanosecond region, a group of HfO2/SiO2 high reflectors with and without suture layers were prepared on prearranged fused silica substrates with femtosecond laser pits. Surface morphology, global coating stress, and high-resolution cross sections were characterized to determine the effects of substrate pit suturing. Laser-induced damage resistance was investigated for samples with and without suture layers. Our results indicate considerable stability in terms of the nanosecond 1064 nm laser-induced damage threshold for samples having a suture layer, due to decreased electronic field (e-field) deformation with simultaneous elimination of internal cracks. In addition, a suture layer formed by plasma ion-assisted deposition could effectively improve global mechanical stress of the coatings. By effectively reducing the multilayer deformation using a suture layer, electron-beam high-reflective coatings, whose laser-induced damage resistance was not influenced by the substrate pit, can be prepared. (C) 2016 Optical Society of America |
Subtype | Article |
Department | 材料 |
DOI | 10.1364/OL.41.003403 |
Funding Organization | National Natural Science Foundation of China (NSFC) [61405225, 61505227, 61308021]; Youth Innovation Promotion Association of the Chinese Academy of Sciences (CAS) ; National Natural Science Foundation of China (NSFC) [61405225, 61505227, 61308021]; Youth Innovation Promotion Association of the Chinese Academy of Sciences (CAS) ; National Natural Science Foundation of China (NSFC) [61405225, 61505227, 61308021]; Youth Innovation Promotion Association of the Chinese Academy of Sciences (CAS) ; National Natural Science Foundation of China (NSFC) [61405225, 61505227, 61308021]; Youth Innovation Promotion Association of the Chinese Academy of Sciences (CAS) |
Indexed By | SCI |
Funding Organization | National Natural Science Foundation of China (NSFC) [61405225, 61505227, 61308021]; Youth Innovation Promotion Association of the Chinese Academy of Sciences (CAS) ; National Natural Science Foundation of China (NSFC) [61405225, 61505227, 61308021]; Youth Innovation Promotion Association of the Chinese Academy of Sciences (CAS) ; National Natural Science Foundation of China (NSFC) [61405225, 61505227, 61308021]; Youth Innovation Promotion Association of the Chinese Academy of Sciences (CAS) ; National Natural Science Foundation of China (NSFC) [61405225, 61505227, 61308021]; Youth Innovation Promotion Association of the Chinese Academy of Sciences (CAS) |
WOS ID | WOS:000381014400004 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.siom.ac.cn/handle/181231/28134 |
Collection | 中科院强激光材料重点实验室 |
Corresponding Author | bree@siom.ac.cn; jdshao@siom.ac.cn |
Affiliation | 中国科学院上海光学精密机械研究所 |
Recommended Citation GB/T 7714 | Chai, Yingjie,Zhu, Meiping,Xing, Huanbin,et al. Multilayer deformation planarization by substrate pit suturing[J]. Opt. Lett.,2016,41(15):3403. |
APA | Chai, Yingjie.,Zhu, Meiping.,Xing, Huanbin.,Wang, Hu.,Cui, Yun.,...&jdshao@siom.ac.cn.(2016).Multilayer deformation planarization by substrate pit suturing.Opt. Lett.,41(15),3403. |
MLA | Chai, Yingjie,et al."Multilayer deformation planarization by substrate pit suturing".Opt. Lett. 41.15(2016):3403. |
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