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Measuring optical constants of ultrathin layers using surface-plasmon-resonance-based imaging ellipsometry
Shan, Yao; Hu, Guohang; Gu, Liyuan; He, Hongbo; Zeng, Aijun; Zhao, Yuanan; Sytchkova, Anna; huguohang@siom.ac.cn; anna.sytchkova@enea.it
2017
发表期刊Appl. Optics
卷号56期号:28页码:7898
摘要A setup for surface-plasmon-resonance-(SPR) based imaging ellipsometry was developed, which gains from the sensitivities of both SPR and ellipsometry to ultrathin film parameters. It is based on Otto's configuration for prism -sample coupling and a wide-beam imaging ellipsometry. A set of ultrathin gold and silver films was measured to determine their optical constants and thicknesses. Coupling the sample using a prism with a convex surface enables us to capture images of generated SPR elliptical fringes, which correspond to different SPR amplitude values at different air gap thicknesses. Analysis of the images acquired at different polarizer and analyzer angles provides the ellipsometric functions. and. versus thickness of air gap and hence the extraction of the optical constants of ultrathin metal films. The measured film thickness is in agreement with the results of x-ray reflectivity measurements.
文章类型Article
部门归属材料
DOI10.1364/AO.56.007898
资助者National Natural Science Foundation of China (NSFC) [61405219]; National Key Research and Development Project of China [2016YFE0104300]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Natural Science Foundation of China (NSFC) [61405219]; National Key Research and Development Project of China [2016YFE0104300]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Natural Science Foundation of China (NSFC) [61405219]; National Key Research and Development Project of China [2016YFE0104300]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Natural Science Foundation of China (NSFC) [61405219]; National Key Research and Development Project of China [2016YFE0104300]; Italian-Chinese Project of Great Relevance [PGR00799]
收录类别SCI
资助者National Natural Science Foundation of China (NSFC) [61405219]; National Key Research and Development Project of China [2016YFE0104300]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Natural Science Foundation of China (NSFC) [61405219]; National Key Research and Development Project of China [2016YFE0104300]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Natural Science Foundation of China (NSFC) [61405219]; National Key Research and Development Project of China [2016YFE0104300]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Natural Science Foundation of China (NSFC) [61405219]; National Key Research and Development Project of China [2016YFE0104300]; Italian-Chinese Project of Great Relevance [PGR00799]
WOS记录号WOS:000412053200017
引用统计
文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28131
专题中科院强激光材料重点实验室
通讯作者huguohang@siom.ac.cn; anna.sytchkova@enea.it
作者单位中国科学院上海光学精密机械研究所
推荐引用方式
GB/T 7714
Shan, Yao,Hu, Guohang,Gu, Liyuan,et al. Measuring optical constants of ultrathin layers using surface-plasmon-resonance-based imaging ellipsometry[J]. Appl. Optics,2017,56(28):7898.
APA Shan, Yao.,Hu, Guohang.,Gu, Liyuan.,He, Hongbo.,Zeng, Aijun.,...&anna.sytchkova@enea.it.(2017).Measuring optical constants of ultrathin layers using surface-plasmon-resonance-based imaging ellipsometry.Appl. Optics,56(28),7898.
MLA Shan, Yao,et al."Measuring optical constants of ultrathin layers using surface-plasmon-resonance-based imaging ellipsometry".Appl. Optics 56.28(2017):7898.
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