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High-precision measurement of optical constants of ultra-thin coating using surface plasmon resonance spectroscopic ellipsometry in Otto-Bliokh configuration
Hu, Guohang; He, Hongbo; Sytchkova, Anna; Zhao, Jiaoling; Shao, Jianda; Grilli, Marialuisa; Piegari, Angela; hbhe@siom.ac.cn; anna.sytchkova@enea.it
2017
Source PublicationOpt. Express
Volume25Issue:12Pages:13425
AbstractIn this paper, a surface plasmon resonance (SPR) spectroscopic ellipsometry, based on Otto-Bliokh configuration. is developed for the measurement of thickness and optical constants of ultra-thin coatings. This technique combines sensitivity of surface plasmon with accessibility of optical constants and other advantages of ellipsometry. Surface plasmons (SP) are generated in the sample under test in total reflectance mode and SP geometric distribution over the sample surface is influenced by the coating thickness and optical properties on one hand, and by the air gap thickness on the other hand. Nanoscale control of the thickness of the air gap between a convex surface and the sample was assured using a micron-size beam spot irradiating the contact zone. The amplitude and phase change induced by SPR in the visible and near-infrared spectral range were obtained to determine the dispersion of optical constants and the thickness of the ultra-thin layer. The extracted optical constants were found to be in excellent agreement with the results obtained using TEM and XRR techniques. Both theoretical analysis and experimental results demonstrated high sensitivity and precision of the proposed technique for the analysis of coatings of both metals and dielectrics on metals. (C) 2017 Optical Society or America
SubtypeArticle
Department材料
DOI10.1364/OE.25.013425
Funding OrganizationNational Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799]
Indexed BySCI
Funding OrganizationNational Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799]
WOS IDWOS:000403942300054
Citation statistics
Cited Times:7[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.siom.ac.cn/handle/181231/28100
Collection中科院强激光材料重点实验室
Corresponding Authorhbhe@siom.ac.cn; anna.sytchkova@enea.it
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
Hu, Guohang,He, Hongbo,Sytchkova, Anna,et al. High-precision measurement of optical constants of ultra-thin coating using surface plasmon resonance spectroscopic ellipsometry in Otto-Bliokh configuration[J]. Opt. Express,2017,25(12):13425.
APA Hu, Guohang.,He, Hongbo.,Sytchkova, Anna.,Zhao, Jiaoling.,Shao, Jianda.,...&anna.sytchkova@enea.it.(2017).High-precision measurement of optical constants of ultra-thin coating using surface plasmon resonance spectroscopic ellipsometry in Otto-Bliokh configuration.Opt. Express,25(12),13425.
MLA Hu, Guohang,et al."High-precision measurement of optical constants of ultra-thin coating using surface plasmon resonance spectroscopic ellipsometry in Otto-Bliokh configuration".Opt. Express 25.12(2017):13425.
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