High-precision measurement of optical constants of ultra-thin coating using surface plasmon resonance spectroscopic ellipsometry in Otto-Bliokh configuration

doi:10.1364/OE.25.013425

	High-precision measurement of optical constants of ultra-thin coating using surface plasmon resonance spectroscopic ellipsometry in Otto-Bliokh configuration
	Hu, Guohang; He, Hongbo; Sytchkova, Anna; Zhao, Jiaoling; Shao, Jianda; Grilli, Marialuisa; Piegari, Angela; hbhe@siom.ac.cn; anna.sytchkova@enea.it
	2017
发表期刊	Opt. Express
卷号	25 期号:12 页码:13425
摘要	In this paper, a surface plasmon resonance (SPR) spectroscopic ellipsometry, based on Otto-Bliokh configuration. is developed for the measurement of thickness and optical constants of ultra-thin coatings. This technique combines sensitivity of surface plasmon with accessibility of optical constants and other advantages of ellipsometry. Surface plasmons (SP) are generated in the sample under test in total reflectance mode and SP geometric distribution over the sample surface is influenced by the coating thickness and optical properties on one hand, and by the air gap thickness on the other hand. Nanoscale control of the thickness of the air gap between a convex surface and the sample was assured using a micron-size beam spot irradiating the contact zone. The amplitude and phase change induced by SPR in the visible and near-infrared spectral range were obtained to determine the dispersion of optical constants and the thickness of the ultra-thin layer. The extracted optical constants were found to be in excellent agreement with the results obtained using TEM and XRR techniques. Both theoretical analysis and experimental results demonstrated high sensitivity and precision of the proposed technique for the analysis of coatings of both metals and dielectrics on metals. (C) 2017 Optical Society or America
文章类型	Article
部门归属	材料
DOI	10.1364/OE.25.013425
资助者	National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799]
收录类别	SCI
资助者	National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799]
WOS记录号	WOS:000403942300054
引用统计	被引频次：4[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.siom.ac.cn/handle/181231/28100
专题	中科院强激光材料重点实验室
通讯作者	hbhe@siom.ac.cn; anna.sytchkova@enea.it
作者单位	中国科学院上海光学精密机械研究所
推荐引用方式 GB/T 7714	Hu, Guohang,He, Hongbo,Sytchkova, Anna,et al. High-precision measurement of optical constants of ultra-thin coating using surface plasmon resonance spectroscopic ellipsometry in Otto-Bliokh configuration[J]. Opt. Express,2017,25(12):13425.
APA	Hu, Guohang.,He, Hongbo.,Sytchkova, Anna.,Zhao, Jiaoling.,Shao, Jianda.,...&anna.sytchkova@enea.it.(2017).High-precision measurement of optical constants of ultra-thin coating using surface plasmon resonance spectroscopic ellipsometry in Otto-Bliokh configuration.Opt. Express,25(12),13425.
MLA	Hu, Guohang,et al."High-precision measurement of optical constants of ultra-thin coating using surface plasmon resonance spectroscopic ellipsometry in Otto-Bliokh configuration".Opt. Express 25.12(2017):13425.