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High-precision measurement of optical constants of ultra-thin coating using surface plasmon resonance spectroscopic ellipsometry in Otto-Bliokh configuration
Hu, Guohang; He, Hongbo; Sytchkova, Anna; Zhao, Jiaoling; Shao, Jianda; Grilli, Marialuisa; Piegari, Angela; hbhe@siom.ac.cn; anna.sytchkova@enea.it
2017
发表期刊Opt. Express
卷号25期号:12页码:13425
摘要In this paper, a surface plasmon resonance (SPR) spectroscopic ellipsometry, based on Otto-Bliokh configuration. is developed for the measurement of thickness and optical constants of ultra-thin coatings. This technique combines sensitivity of surface plasmon with accessibility of optical constants and other advantages of ellipsometry. Surface plasmons (SP) are generated in the sample under test in total reflectance mode and SP geometric distribution over the sample surface is influenced by the coating thickness and optical properties on one hand, and by the air gap thickness on the other hand. Nanoscale control of the thickness of the air gap between a convex surface and the sample was assured using a micron-size beam spot irradiating the contact zone. The amplitude and phase change induced by SPR in the visible and near-infrared spectral range were obtained to determine the dispersion of optical constants and the thickness of the ultra-thin layer. The extracted optical constants were found to be in excellent agreement with the results obtained using TEM and XRR techniques. Both theoretical analysis and experimental results demonstrated high sensitivity and precision of the proposed technique for the analysis of coatings of both metals and dielectrics on metals. (C) 2017 Optical Society or America
文章类型Article
部门归属材料
DOI10.1364/OE.25.013425
资助者National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799]
收录类别SCI
资助者National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799] ; National Key Research and Development Project of China [2016YFE0104300]; International Science & Technology Cooperation Program of China [2012DFG51590]; Italian-Chinese Project of Great Relevance [PGR00799]
WOS记录号WOS:000403942300054
引用统计
被引频次:4[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28100
专题中科院强激光材料重点实验室
通讯作者hbhe@siom.ac.cn; anna.sytchkova@enea.it
作者单位中国科学院上海光学精密机械研究所
推荐引用方式
GB/T 7714
Hu, Guohang,He, Hongbo,Sytchkova, Anna,et al. High-precision measurement of optical constants of ultra-thin coating using surface plasmon resonance spectroscopic ellipsometry in Otto-Bliokh configuration[J]. Opt. Express,2017,25(12):13425.
APA Hu, Guohang.,He, Hongbo.,Sytchkova, Anna.,Zhao, Jiaoling.,Shao, Jianda.,...&anna.sytchkova@enea.it.(2017).High-precision measurement of optical constants of ultra-thin coating using surface plasmon resonance spectroscopic ellipsometry in Otto-Bliokh configuration.Opt. Express,25(12),13425.
MLA Hu, Guohang,et al."High-precision measurement of optical constants of ultra-thin coating using surface plasmon resonance spectroscopic ellipsometry in Otto-Bliokh configuration".Opt. Express 25.12(2017):13425.
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