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Filter calculation based on wavefront figures
Xia ZL(夏志林); Ceng X(曾翔); Liu SJ(刘世杰); Zhou Y(周游); Zhang ZG(张志刚)
2016
发表期刊光学精密工程
期号12页码:3033
摘要To improve the measuring accuracy of optical interferometry, the filtering methods to eliminate the noise in interference fringe patterns were researched. The results of different filtering methods were discussed in different wavefronts and different noises of the interferometer. By taking the effects of interferometric noise on fringe patterns and different wavefronts into account, four kinds of fringe patterns for defocus, astigmatism, coma, spherical aberration were established based on zernike polynomials by matlab simulation. The differences of PV and GRMS values before and after filtering were calculated for different wavefronts. The results on four kinds of wavefronts for defocus, astigmatism, coma, spherical aberration show that under the same kind of noise and filtering, the PV difference of the spherical aberration is largest, up to 0.11λ, which shows a poor filtering effect as compared with the 0.08λ from other wavefront differences under the multiplicative noise. Furthermore, the PV difference of the astigmatism wavefront is smallest, and it is down to 0.05λ excepting median filtering in the multiplicative noise, showing a better filter effect. Moreover, the result of coma wavefront filtering is slightly better than that of the defocus wavefront filtering. For the filter methods, low-pass filters offer high-stability and the differences of the PV is from 0.01λ to 0.04λ, showing a better filtering effect. ? 2016, Science Press. All right reserved.
其他摘要为提高光学干涉测量的精度,研究了用来消除干涉条纹图噪声的滤波算法。讨论了不同波面和不同干涉仪噪声下不同滤波方法的滤波效果。考虑干涉仪噪声对条纹图的影响与检测中的不同波面情况,基于泽尼克多项式原理用matlab仿真法建立了离焦、像散、彗差、球差4种不同的干涉条纹图,计算了滤波后不同波面面形的PV值和GRMS值差别的大小。结果表明:同种噪声与滤波器情况下,在离焦、像散、彗差、球差4种面型中,滤波后球差波面的PV差值最大,高达0.11λ,与在乘性噪声下其它波面的最高PV值0.08λ相比,滤波效果较差;滤波后像散
部门归属材料
DOI10.3788/OPE.20162412.3033
资助者国家自然科学基金青年科学基金资助项目(No.11602280) ; 国家自然科学基金青年科学基金资助项目(No.11602280)
资助者国家自然科学基金青年科学基金资助项目(No.11602280) ; 国家自然科学基金青年科学基金资助项目(No.11602280)
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文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28082
专题中科院强激光材料重点实验室
作者单位中国科学院上海光学精密机械研究所
推荐引用方式
GB/T 7714
Xia ZL,Ceng X,Liu SJ,et al. Filter calculation based on wavefront figures[J]. 光学精密工程,2016(12):3033.
APA 夏志林,曾翔,刘世杰,周游,&张志刚.(2016).Filter calculation based on wavefront figures.光学精密工程(12),3033.
MLA 夏志林,et al."Filter calculation based on wavefront figures".光学精密工程 .12(2016):3033.
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