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Femtosecond laser induced damage of pulse compression gratings
Kong, Fanyu; Huang, Haopeng; Wang, Leilei; Shao, Jianda; Jin, Yunxia; Xia, Zhilin; Chen, Junming; Li, Linxin; yxjin@siom.ac.cn
2017
发表期刊Opt. Laser Technol.
卷号97页码:339
摘要Laser induced damage of Au-coated gratings (ACG) and metal multilayer dielectric gratings (MMDG) for pulse compression were measured using 800 35 nm femto-laser with pulse width of 30.2 fs. The -1st order diffraction efficiency of the ACG is over 90% in wavelength range from 700 to 1000 nm. The MMDG has a 148 nm bandwidth (750-897 nm) with -1st order diffraction efficiency greater than 90%. The laser damage experiment on grating samples was performed in air for single-shot damage. The single-shot damage threshold of the ACG and MMDG was determined to be 0.32 0.02 J/cm(2) and 0.31 0.02 J/cm(2), respectively. The damage morphologies of the ACG revealed that the damage was attributed to the pinholes at the base of the, grating pillars and the weak adhesion between metal layer and photoresist gratings layer. The damage feature combined with near field distribution of MMDG indicated that the damage was due to the nonlinear ionization process of the valence electrons in HfO2 film. According to analysis results, the laser damage resistance of the ACG can be enhanced through avoiding the appearance of pinholes and increasing adhesion between metal layer and photoresist layer. And for the MMDG, good performance of HfO2 film, low near field enhancement and single HfO2 grating structures may increase its laser damage resistance. (C) 2017 Elsevier Ltd. All rights reserved.
文章类型Article
部门归属材料
DOI10.1016/j.optlastec.2017.07.021
资助者National High Technology Research and Development Program of China; National Natural Science Foundation of China [10704079, 11304328, U1430121]; China Academy of Engineering Physics [U1430121] ; National High Technology Research and Development Program of China; National Natural Science Foundation of China [10704079, 11304328, U1430121]; China Academy of Engineering Physics [U1430121] ; National High Technology Research and Development Program of China; National Natural Science Foundation of China [10704079, 11304328, U1430121]; China Academy of Engineering Physics [U1430121] ; National High Technology Research and Development Program of China; National Natural Science Foundation of China [10704079, 11304328, U1430121]; China Academy of Engineering Physics [U1430121]
收录类别SCI
资助者National High Technology Research and Development Program of China; National Natural Science Foundation of China [10704079, 11304328, U1430121]; China Academy of Engineering Physics [U1430121] ; National High Technology Research and Development Program of China; National Natural Science Foundation of China [10704079, 11304328, U1430121]; China Academy of Engineering Physics [U1430121] ; National High Technology Research and Development Program of China; National Natural Science Foundation of China [10704079, 11304328, U1430121]; China Academy of Engineering Physics [U1430121] ; National High Technology Research and Development Program of China; National Natural Science Foundation of China [10704079, 11304328, U1430121]; China Academy of Engineering Physics [U1430121]
WOS记录号WOS:000409284800046
引用统计
文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28080
专题中科院强激光材料重点实验室
通讯作者yxjin@siom.ac.cn
作者单位中国科学院上海光学精密机械研究所
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Kong, Fanyu,Huang, Haopeng,Wang, Leilei,et al. Femtosecond laser induced damage of pulse compression gratings[J]. Opt. Laser Technol.,2017,97:339.
APA Kong, Fanyu.,Huang, Haopeng.,Wang, Leilei.,Shao, Jianda.,Jin, Yunxia.,...&yxjin@siom.ac.cn.(2017).Femtosecond laser induced damage of pulse compression gratings.Opt. Laser Technol.,97,339.
MLA Kong, Fanyu,et al."Femtosecond laser induced damage of pulse compression gratings".Opt. Laser Technol. 97(2017):339.
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