SIOM OpenIR  > 中科院强激光材料重点实验室
Effects of annealing time on the structure, morphology, and stress of gold-chromium bilayer film
Zhang H(张洪); Jin YX(晋云霞); Wang H(王虎); Kong FY(孔钒宇); Huang HP(黄昊鹏); Cui Y(崔云); yxjin@siom.ac.cn
2016
Source PublicationChin. Phys. B
Volume25Issue:10
AbstractIn this work, a 200-nm-thick gold film with a 10-nm-thick chromium layer used as an adhesive layer is fabricated on fused silica by the electron beam evaporation method. The effects of annealing time at 300 degrees C on the structure, morphology and stress of the film are studied. We find that chromium could diffuse to the surface of the film by formatting a solid solution with gold during annealing. Meanwhile, chromium is oxidized on the surface and diffused downward along the grain grooves in the gold film. The various operant mechanisms that change the residual stresses of gold films for different annealing times are discussed.
SubtypeArticle
Department材料
DOI10.1088/1674-1056/25/10/104205
Funding OrganizationNational Natural Science Foundation of China [61405225] ; National Natural Science Foundation of China [61405225] ; National Natural Science Foundation of China [61405225] ; National Natural Science Foundation of China [61405225]
Indexed BySCI
Funding OrganizationNational Natural Science Foundation of China [61405225] ; National Natural Science Foundation of China [61405225] ; National Natural Science Foundation of China [61405225] ; National Natural Science Foundation of China [61405225]
WOS IDWOS:000384227700024
Citation statistics
Document Type期刊论文
Identifierhttp://ir.siom.ac.cn/handle/181231/28058
Collection中科院强激光材料重点实验室
Corresponding Authoryxjin@siom.ac.cn
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
Zhang H,Jin YX,Wang H,et al. Effects of annealing time on the structure, morphology, and stress of gold-chromium bilayer film[J]. Chin. Phys. B,2016,25(10).
APA 张洪.,晋云霞.,王虎.,孔钒宇.,黄昊鹏.,...&yxjin@siom.ac.cn.(2016).Effects of annealing time on the structure, morphology, and stress of gold-chromium bilayer film.Chin. Phys. B,25(10).
MLA 张洪,et al."Effects of annealing time on the structure, morphology, and stress of gold-chromium bilayer film".Chin. Phys. B 25.10(2016).
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