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Effects of annealing time on the structure, morphology, and stress of gold-chromium bilayer film
Zhang H(张洪); Jin YX(晋云霞); Wang H(王虎); Kong FY(孔钒宇); Huang HP(黄昊鹏); Cui Y(崔云); yxjin@siom.ac.cn
2016
发表期刊Chin. Phys. B
卷号25期号:10
摘要In this work, a 200-nm-thick gold film with a 10-nm-thick chromium layer used as an adhesive layer is fabricated on fused silica by the electron beam evaporation method. The effects of annealing time at 300 degrees C on the structure, morphology and stress of the film are studied. We find that chromium could diffuse to the surface of the film by formatting a solid solution with gold during annealing. Meanwhile, chromium is oxidized on the surface and diffused downward along the grain grooves in the gold film. The various operant mechanisms that change the residual stresses of gold films for different annealing times are discussed.
文章类型Article
部门归属材料
DOI10.1088/1674-1056/25/10/104205
资助者National Natural Science Foundation of China [61405225] ; National Natural Science Foundation of China [61405225] ; National Natural Science Foundation of China [61405225] ; National Natural Science Foundation of China [61405225]
收录类别SCI
资助者National Natural Science Foundation of China [61405225] ; National Natural Science Foundation of China [61405225] ; National Natural Science Foundation of China [61405225] ; National Natural Science Foundation of China [61405225]
WOS记录号WOS:000384227700024
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文献类型期刊论文
条目标识符http://ir.siom.ac.cn/handle/181231/28058
专题中科院强激光材料重点实验室
通讯作者yxjin@siom.ac.cn
作者单位中国科学院上海光学精密机械研究所
推荐引用方式
GB/T 7714
Zhang H,Jin YX,Wang H,et al. Effects of annealing time on the structure, morphology, and stress of gold-chromium bilayer film[J]. Chin. Phys. B,2016,25(10).
APA 张洪.,晋云霞.,王虎.,孔钒宇.,黄昊鹏.,...&yxjin@siom.ac.cn.(2016).Effects of annealing time on the structure, morphology, and stress of gold-chromium bilayer film.Chin. Phys. B,25(10).
MLA 张洪,et al."Effects of annealing time on the structure, morphology, and stress of gold-chromium bilayer film".Chin. Phys. B 25.10(2016).
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