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Comparison Among Different Interferometers for Measuring Power Spectral Density of Optical Elements
Yang XH(杨相会); Shen WX(沈卫星); Zhang XJ(张雪洁); Ma XJ(马晓君); yangxh_yx@163.com; wxshen@mail.shcnc.ac.cn
2016
Source Publication中国激光
Volume43Issue:9Pages:904002
AbstractIn order to investigate the response law of different interferometers to the mid-spatial frequency errors and obtain the relatively true power spectral density (PSD) distribution, the 4D AccuFiz, ZYGO DynaFiz and ZYGO GPI interferometers are respectively used to measure the periodic ripples and scratch samples, and the comparative analysis of the measured one-dimension PSD curves is made. The results show that the responsivities to the mid-and high-spatial frequency information are different for different interferometers, and the higher the interferometer resolution is, the higher the responsivity is. The instrument transfer function (ITF) curve is used to correct the measured PSD, and the truer PSD distribution is obtained. However, in the range of some frequency bands, there still exist some difference between the ITF curve and the practical response.
SubtypeArticle
Other Abstract为了探究不同干涉仪对中频误差的响应规律,获得相对真实的功率谱密度(PSD)分布,分别利用4D AccuFiz.ZYGO DynaFiz以及ZYGO GPI三台干涉仪检测周期性波纹和划痕样品,并对一维实测PSD曲线进行对比分析。结果表明,不同干涉仪对中高频信息的响应度不同;干涉仪分辨率越高,响应度越高。利用仪器传递函数(ITF)曲线对实测PSD分布进行了修正,获得了较为真实的PSD分布。在某些频率范围内,标定的ITF曲线和实际响应仍存在差异。
Department联合
DOI10.3788/CJL201643.0904002
Indexed ByCSCD
WOS IDCSCD:5798595
CSCD IDCSCD:5798595
Citation statistics
Document Type期刊论文
Identifierhttp://ir.siom.ac.cn/handle/181231/27939
Collection高功率激光物理国家实验室
Corresponding Authoryangxh_yx@163.com; wxshen@mail.shcnc.ac.cn
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
Yang XH,Shen WX,Zhang XJ,et al. Comparison Among Different Interferometers for Measuring Power Spectral Density of Optical Elements[J]. 中国激光,2016,43(9):904002.
APA 杨相会,沈卫星,张雪洁,马晓君,yangxh_yx@163.com,&wxshen@mail.shcnc.ac.cn.(2016).Comparison Among Different Interferometers for Measuring Power Spectral Density of Optical Elements.中国激光,43(9),904002.
MLA 杨相会,et al."Comparison Among Different Interferometers for Measuring Power Spectral Density of Optical Elements".中国激光 43.9(2016):904002.
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