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Polarization effects in femtosecond laser induced amorphization of monocrystalline silicon
Bai, Feng; Li, Hong-Jin; Huang, Yuan-Yuan; Fan, Wen-Zhong; Pan, Huai-Hai; Wang, Zhuo; Wang, Cheng-Wei; Qian, Jing; Li, Yang-Bo; Zhao, Quan-Zhong; zqz@siom.ac.cn
2016
Source PublicationChem. Phys. Lett.
Volume662Pages:102
AbstractWe have used femtosecond laser pulses to ablate monocrystalline silicon wafer. Raman spectroscopy and X-ray diffraction analysis of ablation surface indicates horizontally polarized laser beam shows an enhancement in amorphization efficiency by a factor of 1.6-1.7 over the circularly polarized laser ablation. This demonstrates that one can tune the amorphization efficiency through the polarization of irradiation laser. (C) 2016 Elsevier B.V. All rights reserved.
SubtypeArticle
Department强光
DOI10.1016/j.cplett.2016.08.080
Funding OrganizationNational Natural Science Foundation of China [61178024, 11374316] ; National Natural Science Foundation of China [61178024, 11374316] ; National Natural Science Foundation of China [61178024, 11374316] ; National Natural Science Foundation of China [61178024, 11374316]
Indexed BySCI
Funding OrganizationNational Natural Science Foundation of China [61178024, 11374316] ; National Natural Science Foundation of China [61178024, 11374316] ; National Natural Science Foundation of China [61178024, 11374316] ; National Natural Science Foundation of China [61178024, 11374316]
WOS IDWOS:000386860900018
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.siom.ac.cn/handle/181231/27703
Collection强场激光物理国家重点实验室
Corresponding Authorzqz@siom.ac.cn
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
Bai, Feng,Li, Hong-Jin,Huang, Yuan-Yuan,et al. Polarization effects in femtosecond laser induced amorphization of monocrystalline silicon[J]. Chem. Phys. Lett.,2016,662:102.
APA Bai, Feng.,Li, Hong-Jin.,Huang, Yuan-Yuan.,Fan, Wen-Zhong.,Pan, Huai-Hai.,...&zqz@siom.ac.cn.(2016).Polarization effects in femtosecond laser induced amorphization of monocrystalline silicon.Chem. Phys. Lett.,662,102.
MLA Bai, Feng,et al."Polarization effects in femtosecond laser induced amorphization of monocrystalline silicon".Chem. Phys. Lett. 662(2016):102.
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