SIOM OpenIR  > 强场激光物理国家重点实验室
Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing
Fang, Zhiwei; Xu, Yingxin; Wang, Min; Qiao, Lingling; Lin, Jintian; Fang, Wei; Cheng, Ya; jintianlin@siom.ac.cn; wfang08@zju.edu.cn; ya.cheng@siom.ac.cn
2017
Source PublicationSci Rep
Volume7
AbstractWe demonstrated integrating a high quality factor lithium niobate microdisk resonator with a free-standing membrane waveguide. Our technique is based on femtosecond laser direct writing which produces the pre-structure, followed by focused ion beam milling which reduces the surface roughness of sidewall of the fabricated structure to nanometer scale. Efficient light coupling between the integrated waveguide and microdisk was achieved, and the quality factor of the microresonator was measured as high as 1.67 x 10(5).
SubtypeArticle
Department强光
DOI10.1038/srep45610
Funding OrganizationNational Basic Research Program of China (Program 973) [2014CB921300]; Natural National Science Foundation of China (NSFC) [61505231, 61405220, 61327902, 61590934]; Fundamental Research Funds for the Central Universities and the Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34] ; National Basic Research Program of China (Program 973) [2014CB921300]; Natural National Science Foundation of China (NSFC) [61505231, 61405220, 61327902, 61590934]; Fundamental Research Funds for the Central Universities and the Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34] ; National Basic Research Program of China (Program 973) [2014CB921300]; Natural National Science Foundation of China (NSFC) [61505231, 61405220, 61327902, 61590934]; Fundamental Research Funds for the Central Universities and the Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34] ; National Basic Research Program of China (Program 973) [2014CB921300]; Natural National Science Foundation of China (NSFC) [61505231, 61405220, 61327902, 61590934]; Fundamental Research Funds for the Central Universities and the Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34]
Indexed BySCI
Funding OrganizationNational Basic Research Program of China (Program 973) [2014CB921300]; Natural National Science Foundation of China (NSFC) [61505231, 61405220, 61327902, 61590934]; Fundamental Research Funds for the Central Universities and the Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34] ; National Basic Research Program of China (Program 973) [2014CB921300]; Natural National Science Foundation of China (NSFC) [61505231, 61405220, 61327902, 61590934]; Fundamental Research Funds for the Central Universities and the Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34] ; National Basic Research Program of China (Program 973) [2014CB921300]; Natural National Science Foundation of China (NSFC) [61505231, 61405220, 61327902, 61590934]; Fundamental Research Funds for the Central Universities and the Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34] ; National Basic Research Program of China (Program 973) [2014CB921300]; Natural National Science Foundation of China (NSFC) [61505231, 61405220, 61327902, 61590934]; Fundamental Research Funds for the Central Universities and the Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34]
WOS IDWOS:000398952300001
Citation statistics
Cited Times:5[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.siom.ac.cn/handle/181231/27680
Collection强场激光物理国家重点实验室
Corresponding Authorjintianlin@siom.ac.cn; wfang08@zju.edu.cn; ya.cheng@siom.ac.cn
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
Fang, Zhiwei,Xu, Yingxin,Wang, Min,et al. Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing[J]. Sci Rep,2017,7.
APA Fang, Zhiwei.,Xu, Yingxin.,Wang, Min.,Qiao, Lingling.,Lin, Jintian.,...&ya.cheng@siom.ac.cn.(2017).Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing.Sci Rep,7.
MLA Fang, Zhiwei,et al."Monolithic integration of a lithium niobate microresonator with a free-standing waveguide using femtosecond laser assisted ion beam writing".Sci Rep 7(2017).
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