SIOM OpenIR  > 强场激光物理国家重点实验室
Internal Laser Writing of High-Aspect-Ratio Microfluidic Structures in Silicate Glasses for Lab-on-a-Chip Applications
Cheng, Ya; ycheng@phy.ecnu.edu.cn
2017
Source PublicationMicromachines
Volume8Issue:2
AbstractFemtosecond laser direct writing is unique in allowing for fabrication of 3D micro- and nanofluidic structures, thereby enabling rapid and efficient manipulation of fluidic dynamics in 3D space to realize innovative functionalities. Here, I discuss the challenges in producing fully functional and highly integrated 3D micro- and nanofluidic systems with potential applications ranging from chemical and biological analyses to investigations of nanofluidic behaviors. In particular, I review the achievements we have made in the past decade, which have led to 3D microchannels with controllable cross-sectional profiles and large aspect ratios, 3D nanofluidic channels with widths of several tens of nanometers, and smooth inner walls with roughness on the order of similar to 1 nm. Integration of the microfluidics with other functional microcomponents including microoptics and microelectrodes will also be discussed, followed by conclusions and the future perspective.
SubtypeReview
Department强光
DOI10.3390/mi8020059
Funding OrganizationNational Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61590934, 11134010, 61327902] ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61590934, 11134010, 61327902] ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61590934, 11134010, 61327902] ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61590934, 11134010, 61327902]
Indexed BySCI
Funding OrganizationNational Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61590934, 11134010, 61327902] ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61590934, 11134010, 61327902] ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61590934, 11134010, 61327902] ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61590934, 11134010, 61327902]
WOS IDWOS:000395476000029
Citation statistics
Document Type期刊论文
Identifierhttp://ir.siom.ac.cn/handle/181231/27660
Collection强场激光物理国家重点实验室
Corresponding Authorycheng@phy.ecnu.edu.cn
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
Cheng, Ya,ycheng@phy.ecnu.edu.cn. Internal Laser Writing of High-Aspect-Ratio Microfluidic Structures in Silicate Glasses for Lab-on-a-Chip Applications[J]. Micromachines,2017,8(2).
APA Cheng, Ya,&ycheng@phy.ecnu.edu.cn.(2017).Internal Laser Writing of High-Aspect-Ratio Microfluidic Structures in Silicate Glasses for Lab-on-a-Chip Applications.Micromachines,8(2).
MLA Cheng, Ya,et al."Internal Laser Writing of High-Aspect-Ratio Microfluidic Structures in Silicate Glasses for Lab-on-a-Chip Applications".Micromachines 8.2(2017).
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