High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions | |
Tan, Yuanxin; Wang, Zhaohui; Chu, Wei; Liao, Yang; Qiao, Lingling; Cheng, Ya; ya.cheng@siom.ac.cn | |
2016 | |
Source Publication | Opt. Mater. Express
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Volume | 6Issue:12Pages:3787 |
Abstract | We report on the fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of similar to 100 mu m. (C) 2016 Optical Society of America |
Subtype | Article |
Department | 强光 |
DOI | 10.1364/OME.6.003787 |
Funding Organization | National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61327902, 11104294, 61275205, 61405220, 61221064, 11304330]; Youth Innovation Promotion Association of Chinese Academy of Sciences ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61327902, 11104294, 61275205, 61405220, 61221064, 11304330]; Youth Innovation Promotion Association of Chinese Academy of Sciences ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61327902, 11104294, 61275205, 61405220, 61221064, 11304330]; Youth Innovation Promotion Association of Chinese Academy of Sciences ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61327902, 11104294, 61275205, 61405220, 61221064, 11304330]; Youth Innovation Promotion Association of Chinese Academy of Sciences |
Indexed By | SCI |
Funding Organization | National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61327902, 11104294, 61275205, 61405220, 61221064, 11304330]; Youth Innovation Promotion Association of Chinese Academy of Sciences ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61327902, 11104294, 61275205, 61405220, 61221064, 11304330]; Youth Innovation Promotion Association of Chinese Academy of Sciences ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61327902, 11104294, 61275205, 61405220, 61221064, 11304330]; Youth Innovation Promotion Association of Chinese Academy of Sciences ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61327902, 11104294, 61275205, 61405220, 61221064, 11304330]; Youth Innovation Promotion Association of Chinese Academy of Sciences |
WOS ID | WOS:000390408500011 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.siom.ac.cn/handle/181231/27652 |
Collection | 强场激光物理国家重点实验室 |
Corresponding Author | ya.cheng@siom.ac.cn |
Affiliation | 中国科学院上海光学精密机械研究所 |
Recommended Citation GB/T 7714 | Tan, Yuanxin,Wang, Zhaohui,Chu, Wei,et al. High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions[J]. Opt. Mater. Express,2016,6(12):3787. |
APA | Tan, Yuanxin.,Wang, Zhaohui.,Chu, Wei.,Liao, Yang.,Qiao, Lingling.,...&ya.cheng@siom.ac.cn.(2016).High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions.Opt. Mater. Express,6(12),3787. |
MLA | Tan, Yuanxin,et al."High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions".Opt. Mater. Express 6.12(2016):3787. |
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