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Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications
Wang, Min; Lin, Jin-Tian; Xu, Ying-Xin; Fang, Zhi-Wei; Qiao, Ling-Ling; Liu, Zheng-Ming; Fang, Wei; Cheng, Ya; wfang08@zju.edu.cn; ya.cheng@siom.ac.cn
2017
Source PublicationOpt. Commun.
Volume395Pages:249
AbstractFemtosecond laser micromachining has been a promising technique for fabricating three-dimensional (3D) micro/nano-structures in various kinds of dielectric materials with unprecedented spatial resolutions as well as flexibility in terms of the geometry and the materials can be processed. This unique capability opens opportunities for fabrication of 3D high-quality (Q) microresonators, which are one of the key elements in modern photonic applications. Here, we review the recent progress in fabrication of high-Q microresonators on glass and crystalline substrates by employing femtosecond laser direct writing. We demonstrate the applications of the fabricated microresonators in generating low-threshold lasers, high-sensitivity chemical sensing and nonlinear optical wavelength conversion. (C) 2016 Elsevier B.V. All rights reserved.
SubtypeArticle
Department强光
DOI10.1016/j.optcom.2016.05.025
Funding OrganizationNational Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China (NSFC) [61275205, 11174305, 61505231]; Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34] ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China (NSFC) [61275205, 11174305, 61505231]; Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34] ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China (NSFC) [61275205, 11174305, 61505231]; Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34] ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China (NSFC) [61275205, 11174305, 61505231]; Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34]
Indexed BySCI
Funding OrganizationNational Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China (NSFC) [61275205, 11174305, 61505231]; Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34] ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China (NSFC) [61275205, 11174305, 61505231]; Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34] ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China (NSFC) [61275205, 11174305, 61505231]; Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34] ; National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China (NSFC) [61275205, 11174305, 61505231]; Open Fund of the State Key Laboratory on Integrated Optoelectronics [IOSKL2015KF34]
WOS IDWOS:000401600500041
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Document Type期刊论文
Identifierhttp://ir.siom.ac.cn/handle/181231/27617
Collection强场激光物理国家重点实验室
Corresponding Authorwfang08@zju.edu.cn; ya.cheng@siom.ac.cn
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
Wang, Min,Lin, Jin-Tian,Xu, Ying-Xin,et al. Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications[J]. Opt. Commun.,2017,395:249.
APA Wang, Min.,Lin, Jin-Tian.,Xu, Ying-Xin.,Fang, Zhi-Wei.,Qiao, Ling-Ling.,...&ya.cheng@siom.ac.cn.(2017).Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications.Opt. Commun.,395,249.
MLA Wang, Min,et al."Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications".Opt. Commun. 395(2017):249.
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