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Two-degree-freedom displacement measurement based on a short period grating in symmetric Littrow configuration
Lu, Yancong; Wei, Chunlong; Jia, Wei; Li, Shubin; Yu, Junjie; Li, Minkang; Xiang, Changcheng; Xiang, Xiansong; Wang, Jin; Ma, Jianyong; Zhou, Changhe; chazhou@mail.shcnc.ac.cn
2016
Source PublicationOpt. Commun.
Volume380Pages:382
AbstractAn optical encoder based on symmetric Littrow configuration is presented. Although the grating is one dimensional, both horizontal and vertical displacement can be measured simultaneously. The angle between grating vector and horizontal movement is taken into account in the measurement results, which not only decreases the requirement of installation but also decreases the cosine error. Thanks to the short grating period of 561.8 nm, a high resolution of 0.137 nm is obtained. The measurement results of optical encoder are compared with that of commercial laser interferometer. The coincident results demonstrate that the encoder should be a useful optical measurement device for detecting two-dimensional movement. (C) 2016 Published by Elsevier B.V.
SubtypeArticle
Department信息光电
DOI10.1016/j.optcom.2016.06.016
Funding OrganizationNational Natural Science Foundation of China (NSFC) [61405214, 61308077, 61127013] ; National Natural Science Foundation of China (NSFC) [61405214, 61308077, 61127013] ; National Natural Science Foundation of China (NSFC) [61405214, 61308077, 61127013] ; National Natural Science Foundation of China (NSFC) [61405214, 61308077, 61127013]
Indexed BySCI
Funding OrganizationNational Natural Science Foundation of China (NSFC) [61405214, 61308077, 61127013] ; National Natural Science Foundation of China (NSFC) [61405214, 61308077, 61127013] ; National Natural Science Foundation of China (NSFC) [61405214, 61308077, 61127013] ; National Natural Science Foundation of China (NSFC) [61405214, 61308077, 61127013]
WOS IDWOS:000382793800056
Citation statistics
Cited Times:7[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.siom.ac.cn/handle/181231/27543
Collection信息光学与光电技术实验室
Corresponding Authorchazhou@mail.shcnc.ac.cn
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
Lu, Yancong,Wei, Chunlong,Jia, Wei,et al. Two-degree-freedom displacement measurement based on a short period grating in symmetric Littrow configuration[J]. Opt. Commun.,2016,380:382.
APA Lu, Yancong.,Wei, Chunlong.,Jia, Wei.,Li, Shubin.,Yu, Junjie.,...&chazhou@mail.shcnc.ac.cn.(2016).Two-degree-freedom displacement measurement based on a short period grating in symmetric Littrow configuration.Opt. Commun.,380,382.
MLA Lu, Yancong,et al."Two-degree-freedom displacement measurement based on a short period grating in symmetric Littrow configuration".Opt. Commun. 380(2016):382.
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