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Pitch evaluation of gratings based on a digital image correlation technique
Lu, Yancong; Jia, Wei; Wei, Chunlong; Yu, Junjie; Li, Shubin; Li, Yanyang; Li, Minkang; Qiu, Jucheng; Wang, Shaoqing; Zhou, Changhe; chazhou@mail.shcnc.ac.cn
2016
Source PublicationOpt. Commun.
Volume365Pages:68
AbstractThe digital image correlation (DIC) technique used for metrological grating evaluation is presented in this paper. A CCD camera is used to acquire the grating image, and the DIC technique together with the peak position detection method is used to evaluate the grating pitches. The theoretical analysis and simulations are performed to confirm that the performance of our technique is as accurate as the Fourier transform (Fr) technique, and is capable of noise resistance. As an example, the uniformity of the grating fabricated in our laboratory is measured using this method. The experimental results show that this grating has a peak-to-valley uniformity of 48 nm during a long range of 35 mm, and our technique has a higher repeatability than the FT technique in our measurement strategy. This work should be of great significance for the evaluation of metrological grating for optical encoders. (C) 2015 Elsevier B.V. All rights reserved.
SubtypeArticle
Department信息光电
DOI10.1016/j.optcom.2015.11.069
Funding OrganizationNational Science Foundation (NSF) [61127013, 61405214, 61308073] ; National Science Foundation (NSF) [61127013, 61405214, 61308073] ; National Science Foundation (NSF) [61127013, 61405214, 61308073] ; National Science Foundation (NSF) [61127013, 61405214, 61308073]
Indexed BySCI
Funding OrganizationNational Science Foundation (NSF) [61127013, 61405214, 61308073] ; National Science Foundation (NSF) [61127013, 61405214, 61308073] ; National Science Foundation (NSF) [61127013, 61405214, 61308073] ; National Science Foundation (NSF) [61127013, 61405214, 61308073]
WOS IDWOS:000369233100012
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.siom.ac.cn/handle/181231/27528
Collection信息光学与光电技术实验室
Corresponding Authorchazhou@mail.shcnc.ac.cn
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
Lu, Yancong,Jia, Wei,Wei, Chunlong,et al. Pitch evaluation of gratings based on a digital image correlation technique[J]. Opt. Commun.,2016,365:68.
APA Lu, Yancong.,Jia, Wei.,Wei, Chunlong.,Yu, Junjie.,Li, Shubin.,...&chazhou@mail.shcnc.ac.cn.(2016).Pitch evaluation of gratings based on a digital image correlation technique.Opt. Commun.,365,68.
MLA Lu, Yancong,et al."Pitch evaluation of gratings based on a digital image correlation technique".Opt. Commun. 365(2016):68.
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