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Measuring Method of Polarization Aberration Based on Vector Aerial Image of Alternating Phase-shift Mask
Shen LN(沈丽娜); Wang XC(王向朝); Li SK(李思坤); Yan GY(闫观勇); Zhu BE(诸波尔); Meng ZJ(孟泽江); Zhang H(张恒); shenlina@siom.ac.cn; wxz26267@siom.ac.cn
2016
Source Publication光学学报
Volume36Issue:8Pages:811003
AbstractA measuring method of polarization aberration based on aerial image of alternating phase-shift mask is proposed.The polarization aberration is represented by Pauli-Zernike coefficients.The image placement error and best focus shift are measured by image sensor at multiple illumination settings,combined with X and Ylinearly polarized illuminating light.The Pauli-Zernike coefficients are retrieved using the calibrated sensitivity matrix of polarization aberration.The validity of this proposed method is verified by numerical simulations,and the results indicate that the measuring accuracy is less than 3.07 mlambda.
SubtypeArticle
Other Abstract提出一种基于交替相移掩模空间像的光刻机投影物镜偏振像差检测方法。采用泡利-泽尼克系数表征偏振像差,结合X和Y两种线性偏振照明方式,用像传感器测量不同照明条件下掩模空间像的成像位置偏移与最佳焦面偏移,利用标定的偏振像差灵敏度矩阵计算获得泡利-泽尼克系数。采用光刻仿真软件对本文方法的有效性进行了验证,结果表明其检测精度优于3.07 mlambda。
Department信息光电
DOI10.3788/AOS201636.0828001
Funding Organization国家自然科学基金 ; 国家自然科学基金 ; 国家自然科学基金 ; 国家自然科学基金
Indexed ByCSCD
Funding Organization国家自然科学基金 ; 国家自然科学基金 ; 国家自然科学基金 ; 国家自然科学基金
WOS IDCSCD:5777799
CSCD IDCSCD:5777799
Citation statistics
Document Type期刊论文
Identifierhttp://ir.siom.ac.cn/handle/181231/27516
Collection信息光学与光电技术实验室
Corresponding Authorshenlina@siom.ac.cn; wxz26267@siom.ac.cn
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
Shen LN,Wang XC,Li SK,et al. Measuring Method of Polarization Aberration Based on Vector Aerial Image of Alternating Phase-shift Mask[J]. 光学学报,2016,36(8):811003.
APA 沈丽娜.,王向朝.,李思坤.,闫观勇.,诸波尔.,...&wxz26267@siom.ac.cn.(2016).Measuring Method of Polarization Aberration Based on Vector Aerial Image of Alternating Phase-shift Mask.光学学报,36(8),811003.
MLA 沈丽娜,et al."Measuring Method of Polarization Aberration Based on Vector Aerial Image of Alternating Phase-shift Mask".光学学报 36.8(2016):811003.
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