SIOM OpenIR  > 信息光学与光电技术实验室
Measurement precision improvement for excimer laser pulse energy sensor based on a special finite impulse response filter
Xie, Chengke; Chen, Ming; Zhu, Jing; Yang, Baoxi; Huang, Huijie; xchke@126.com
2017
Source PublicationJ. Opt. Technol.
Volume84Issue:5Pages:346
AbstractIn deep ultraviolet lithographic tools, precise measurement of excimer laser pulse energy is essential. However, system noise of the energy sensor, which is used to monitor the laser pulse during exposure dose control, complicate pulse energy measurement. To improve measurement precision, a specific finite impulse response filter is proposed for signal denoising. Particularly, the convolution kernel of the specific finite impulse response filter is derived from the nonlinear fitting of the energy sensor output. Experimental results show that the measurement precision of the energy sensor improves 2-3 times with the specific finite impulse response filter. To verify the effectiveness of the energy sensor, it is used for transmittance measurement; the measurement result of a Corning 7980 witness sample is consistent with that measured by a commercial ultraviolet spectrophotometer and the measurement accuracy is 0.11% (k = 2).
SubtypeArticle
Department信息光电
DOI10.1364/JOT.84.000346
Indexed BySCI
WOS IDWOS:000408267400010
Citation statistics
Document Type期刊论文
Identifierhttp://ir.siom.ac.cn/handle/181231/27515
Collection信息光学与光电技术实验室
Corresponding Authorxchke@126.com
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
Xie, Chengke,Chen, Ming,Zhu, Jing,et al. Measurement precision improvement for excimer laser pulse energy sensor based on a special finite impulse response filter[J]. J. Opt. Technol.,2017,84(5):346.
APA Xie, Chengke,Chen, Ming,Zhu, Jing,Yang, Baoxi,Huang, Huijie,&xchke@126.com.(2017).Measurement precision improvement for excimer laser pulse energy sensor based on a special finite impulse response filter.J. Opt. Technol.,84(5),346.
MLA Xie, Chengke,et al."Measurement precision improvement for excimer laser pulse energy sensor based on a special finite impulse response filter".J. Opt. Technol. 84.5(2017):346.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Xie, Chengke]'s Articles
[Chen, Ming]'s Articles
[Zhu, Jing]'s Articles
Baidu academic
Similar articles in Baidu academic
[Xie, Chengke]'s Articles
[Chen, Ming]'s Articles
[Zhu, Jing]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Xie, Chengke]'s Articles
[Chen, Ming]'s Articles
[Zhu, Jing]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.