SIOM OpenIR  > 信息光学与光电技术实验室
采用空间像降维的光刻投影物镜偏振像差原位检测方法
孟泽江; 李思坤; 王向朝
2016
Source Publication第十六届全国光学测试学术交流会摘要集
Department信息光电
Abstract随着光刻分辨率的提高,大数值孔径投影物镜和偏振光照明的采用,投影物镜的偏振像差对光刻成像的影响变得不可忽略。偏振像差会引起图形位置偏移和最佳焦面偏移,从而降低光刻机的分辨率和套刻精度。此外,投影物镜经过装调和曝光后其偏振像差会发生改变,因此需要对偏振像差进行原位检测。目前光刻投影物镜偏振像差的原位检测方法可分为基于瞳面测量和基于空间像的
Language中文
Document Type会议论文
Identifierhttp://ir.siom.ac.cn/handle/181231/27470
Collection信息光学与光电技术实验室
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
孟泽江,李思坤,王向朝. 采用空间像降维的光刻投影物镜偏振像差原位检测方法[C],2016.
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