SIOM OpenIR  > 信息光学与光电技术实验室
光刻投影物镜热像差分析方法
茅言杰; 李思坤; 孙刚; 王健; 王磊; 步扬; 王向朝
2016
Source Publication第十六届全国光学测试学术交流会摘要集
Department信息光电
Abstract投影物镜是光刻机最复杂、最重要的分系统之一。在光刻机工作过程中,投影物镜的热效应会引起光刻机成像质量劣化,热像差是投影物镜像差的主要来源之一。除光刻机工作阶段采用像质前馈校正技术对热像差进行补偿外,在投影物镜设计阶段需考虑通过优化设计最大限度的减小热像差。热像差分析对优化投影物镜设计具有重要意义。常见的热像差分析方法有物理模
Language中文
Document Type会议论文
Identifierhttp://ir.siom.ac.cn/handle/181231/27465
Collection信息光学与光电技术实验室
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
茅言杰,李思坤,孙刚,等. 光刻投影物镜热像差分析方法[C],2016.
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