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基于亚像素分析的光刻机照明系统光瞳参数检测方法
刘志帆; 步扬; 徐静浩; 张建华; 王向朝
2016
Source Publication第十六届全国光学测试学术交流会摘要集
Department信息光电
Abstract照明系统是光刻机的重要组成部分,其作用是为光刻机提供满足要求的照明模式。常用的照明模式包括传统照明、环形照明、二极照明和四极照明等,主要用于改善不同类型光刻图形的成像质量。照明光瞳的特性参数决定照明模式,对照明光瞳特性参数进行高精度检测是保障照明系统可靠性和稳定性的关键之一。目前照明光瞳特性参数测量主要是使用CCD采集光瞳图像,对图像进行系列计算
Language中文
Document Type会议论文
Identifierhttp://ir.siom.ac.cn/handle/181231/27464
Collection信息光学与光电技术实验室
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
刘志帆,步扬,徐静浩,等. 基于亚像素分析的光刻机照明系统光瞳参数检测方法[C],2016.
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