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基于LIBS的光学玻璃微量杂质三维分布检测技术
张海裕; 步扬; 郑臻荣; 徐静浩; 王向朝
2016
Source Publication第十六届全国光学测试学术交流会摘要集
Department信息光电
Abstract高精密、高功率光学系统中的光学玻璃所含杂质会严重影响光学系统性能,如光学玻璃研磨抛光后,表面残留液会严重影响高功率光学系统光束质量,甚至导致光学器件损伤。为了保证高精密、高功率光学系统的性能,必须对光学玻璃中存在的杂质进行检测。X射线荧光仪等传统元素检测方法所能检测的元素种类有限且易受干扰。激光诱导击穿光谱技术(LIBS)作为一种新型元素分析技术,具有样品无需准
Language中文
Document Type会议论文
Identifierhttp://ir.siom.ac.cn/handle/181231/27459
Collection信息光学与光电技术实验室
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
张海裕,步扬,郑臻荣,等. 基于LIBS的光学玻璃微量杂质三维分布检测技术[C],2016.
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