Temporal speckle method for measuring three-dimensional surface of large-sized rough glass

SIOM OpenIR > 信息光学与光电技术实验室

	Temporal speckle method for measuring three-dimensional surface of large-sized rough glass
	Li, Chao; Zhou, Changhe; Wang, Shaoqing; Fan, Xin; Yang, Boquan; Lu, Yancong; Li, Hao; Liu, Zhao; chazhou@mail.shcnc.ac.cn
	2017
Source Publication	HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS VII
ISSN	0277-786X
Department	信息光电
Abstract	To provide accurate three-dimensional (3-D) data for production and processing, 3-D surface measurement is always an essential step to the production of glass. Profilometry and Interferometry are traditional measurement apparatus, referring to different procedures. Although more precise, Interferometry cannot be used in milling procedure, owing to the scattering property of rough glass. While as a widely used Profilometry, Coordinate Measuring Machine (CMM) employs a probe for measuring by contacting surface directly. It should be noted that such a time-consuming machine is not practical for measuring large-sized rough glass, so a novel designed method called temporal speckle is introduced to a non-contact binocular 3-D measurement system for measuring. Specifically, N band-limited binary patterns are sequentially projected to rough glass from a pattern generation device, such patterns have been proved to depress scattering properties of rough surface. The whole binocular 3-D measurement system can finish a single measurement in one second with a standard deviation less than 73.44um. This system performs fast and accurate 3-D surface measurement for large-sized rough glass block.
Language	英语
Document Type	会议论文
Identifier	http://ir.siom.ac.cn/handle/181231/27445
Collection	信息光学与光电技术实验室
Corresponding Author	chazhou@mail.shcnc.ac.cn
Affiliation	中国科学院上海光学精密机械研究所
Recommended Citation GB/T 7714	Li, Chao,Zhou, Changhe,Wang, Shaoqing,et al. Temporal speckle method for measuring three-dimensional surface of large-sized rough glass[C],2017.

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