SIOM OpenIR  > 高密度光存储技术实验室
High resolution patterning on AgInSbTe thin films by laser thermal lithography
Zhou, Qijun; Zhang, Kui; Wei, Tao; Wei, Jingsong; weijingsong@siom.ac.cn
2016
Source Publication2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage
ISSN0277-786X
Department存储
AbstractFabrication of high-resolution micro-structures is essential for DOEs and MEMS and has attracted increasing attention. In this study, several high-resolution micro-structures have been fabricated on AgInSbTe phase-change films by laser thermal lithography, and the minimum linewidth of these structures is about 200 nm, which is smaller than the size of the focused spot. The results indicate that laser thermal lithography is a simple and effective technique for the fabrication of micro-structures on AgInSbTe phase-change thin films.
Language英语
Document Type会议论文
Identifierhttp://ir.siom.ac.cn/handle/181231/27431
Collection高密度光存储技术实验室
Corresponding Authorweijingsong@siom.ac.cn
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
Zhou, Qijun,Zhang, Kui,Wei, Tao,et al. High resolution patterning on AgInSbTe thin films by laser thermal lithography[C],2016.
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