SIOM OpenIR  > 中科院强激光材料重点实验室
大口径数字波面干涉仪量值传递及测量不确定度的研究
潘本威; 周游; 白云波; 刘世杰
2016
Source Publication第十六届全国光学测试学术交流会摘要集
Department材料
Abstract高功率激光系统中使用了大量的大口径平面光学元件,为了满足大口径、高精度光学元件制造能力,提高光学元件的加工精度,在各个关键生产工序环节以及光学元件终检环节均配备了大口径干涉仪,这些干涉仪基本上可以分为进口和国产自研两种型号。为了保证各个环节中干涉仪测量数据的一致性,如何实现各个工序环节间的干涉仪量值传递的准确性是目前工程加工检测中急需解决的问题。本文对大口径数字波
Language中文
Document Type会议论文
Identifierhttp://ir.siom.ac.cn/handle/181231/27422
Collection中科院强激光材料重点实验室
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
潘本威,周游,白云波,等. 大口径数字波面干涉仪量值传递及测量不确定度的研究[C],2016.
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