SIOM OpenIR  > 中科院强激光材料重点实验室
子孔径拼接在米量级平面光学元件面形误差检测中的应用
周游; 刘世杰; 白云波; 张志刚; 邵建达
2016
Source Publication第十六届全国光学测试学术交流会摘要集
Department材料
Abstract应用于高功率激光装置中的光学元件具有尺寸大、精度高、数量多等特点,包括偏振片、钕玻璃片、反射镜以及脉冲压缩光栅等大口径平面光学元件,其中大部分光学元件为矩形,外形尺寸(对角线)都接近甚至超过了米量级。利用大口径平面干涉仪(口径最大到Φ800mm),基于斜入射的测量方法可以满足部分口径小于1m的矩形光学元件面形以及反射波前误差的检测,但是对于元件尺寸超过1m的光学元件,例如
Language中文
Document Type会议论文
Identifierhttp://ir.siom.ac.cn/handle/181231/27421
Collection中科院强激光材料重点实验室
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
周游,刘世杰,白云波,等. 子孔径拼接在米量级平面光学元件面形误差检测中的应用[C],2016.
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