SIOM OpenIR  > 高功率激光物理国家实验室
A Novel Method about Online Monitoring Surface Shape of Optical Elements in Continuous Polishing
Yin Jin; Zhu Jianqiang; Jiao Xiang; Wu Yongzhong
2016
Source PublicationADVANCED OPTICAL MANUFACTURING TECHNOLOGIES
ISSN0277-786X
Department联合
AbstractIn conventional continuous polishing process, the surface shape of work-piece was measured by an optical plane template after being placed in such environment with constant temperature for 1 to 2 hours. During this period, uncertain influence may occur on the polishing pad due to the change of system state. Meanwhile, the regular off-line testing may cause re-processing. In this paper, a new method about on-line monitoring surface shape of optical elements is proposed by the theory of run-sphere, and the change in curvature radius of the work-piece which lead to its radial tilt angle change. The change in work-piece surface shape indirectly obtain by the correction plate small angle with respect to the horizontal, and the angle were detected on line by the high-precision goniometer with the resolution 0.04 ''. According to theoretical calculations, the diameter of 200mm precision work-piece PV value up to 0.02 lambda (lambda = 632.8nm). The fused quartz glass was measured by above method. The test results showed that the surface accuracy and processing efficiency were significantly promoted, and also improving the controllability of surface shape of work-piece based on this method.
Language英语
Document Type会议论文
Identifierhttp://ir.siom.ac.cn/handle/181231/27382
Collection高功率激光物理国家实验室
Affiliation中国科学院上海光学精密机械研究所
Recommended Citation
GB/T 7714
Yin Jin,Zhu Jianqiang,Jiao Xiang,et al. A Novel Method about Online Monitoring Surface Shape of Optical Elements in Continuous Polishing[C],2016.
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