SIOM OpenIR  > 高密度光存储技术实验室
测量大数值孔径光学系统小光斑的方法
Alternative TitleMethod for Testing Small Light Spot Produced by an Optical System with High NA
徐文东; 干福熹
2003
Source Publication中国激光
Volume30Issue:2Pages:171
Abstract介绍了一种小孔扫描测量大数值孔径光学系统小光斑的方法。利用近场光学显微镜的光纤探针采样技术和压电陶瓷扫描技术,可对光学系统小光斑的光强分布进行高空间分辨的测量。由于光纤探针采样点的大小为几十纳米或更小,压电陶瓷扫描间距为几纳米或更小,因此该方法特别适合大数值孔径光学系统小光斑的测量。实验证明,采用该方法,测量的空间分辨率可达50 ~ 100 nm左右。
SubtypeArticle
Other AbstractThis paper introduced a method to testing small light spot produced by an optical system with high NA. By using technology of fiber probe detecting and PZT tube scanning of near-field optical microscopy, the small light spot can be measured with high spatial resolution. The results show that a resolution of 50 ~ 100 nm can be obtained.
Indexed ByEI
Language中文
Document Type期刊论文
Version出版稿
Identifierhttp://ir.siom.ac.cn/handle/181231/18387
Collection高密度光存储技术实验室
Affiliation1.Xu Wendong, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China.
2.Gan Fuxi, Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800, China.
Recommended Citation
GB/T 7714
徐文东,干福熹. 测量大数值孔径光学系统小光斑的方法[J]. 中国激光,2003,30(2):171.
APA 徐文东,&干福熹.(2003).测量大数值孔径光学系统小光斑的方法.中国激光,30(2),171.
MLA 徐文东,et al."测量大数值孔径光学系统小光斑的方法".中国激光 30.2(2003):171.
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