SIOM OpenIR  > 激光与光电子功能材料研发中心
氟化钙晶体生长的研究进展
Alternative TitleResearch and Progress of CaF_2 Crystal Growth
苏良碧; 杨卫桥; 董永军; 周圣明; 周国清; 徐军
2003
Source Publication人工晶体学报
Volume32Issue:5Pages:476
Abstract随着深紫外光刻技术的发展,透光范围宽、透过率高的CaF_2晶体成了人们关注的焦点,其尺寸和质量得到了不断的提高,结合CaF_2的基本性质,综述了CaF_2晶体的主要生长方法及存在的问题。从原料的纯化处理到晶体的光学加工,归纳总结了提高紫外级CaF_2晶体的尺寸、质量和产率的有效措施。
SubtypeArticle
Other AbstractCaF_2 crystal with broad wavelength range and high transmittance has become the focus of the semiconductor industry with the development of UV-lithography. Therefore, the size and quality of CaF_2 crystal have gained continuous enhancement. Combined with the fundamental properties of CaF_2, the main CaF_2 crystal growth methods and existing problems were summarized, Those effective ways of improving the size, quality and rate of production of UV-graded CaF_2 crystal were introduced from the purification of raw materials to the surface finish of crystal.
Indexed ByEI
Language中文
Document Type期刊论文
Version出版稿
Identifierhttp://ir.siom.ac.cn/handle/181231/18336
Collection激光与光电子功能材料研发中心
Affiliation1.Su Liangbi, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
2.Yang Weiqiao, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
3.Dong Yongjun, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
4.Zhou Shenming, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
5.Zhou Guoqing, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
6.Xu Jun, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.
Recommended Citation
GB/T 7714
苏良碧,杨卫桥,董永军,等. 氟化钙晶体生长的研究进展[J]. 人工晶体学报,2003,32(5):476.
APA 苏良碧,杨卫桥,董永军,周圣明,周国清,&徐军.(2003).氟化钙晶体生长的研究进展.人工晶体学报,32(5),476.
MLA 苏良碧,et al."氟化钙晶体生长的研究进展".人工晶体学报 32.5(2003):476.
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