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Co/Sb多层膜非单色反射率的计算
冯仕猛; 赵海鹰; 邵建达; 范正修; 窦晓鸣
2003
Source Publication科学通报
Volume48Issue:12Pages:1264
AbstractCo/Sb多层膜在光子能量为528 eV和掠入射为10.3degrees时有近62%理论反射率.推导出了入射光为非单色光时多层膜反射率的计算方法, 分析了不同入射光能量分辨率对多层膜测量反射率的影响.结果表明: Co/Sb多层膜测量反射率对入射光能量分辨率有强烈的依赖性, 如果入射光能量分辨率小, 将导致测量反射率远小于理论反射率.只有在入射光能量分辨率达到1600以上, 测量反射率才等于多层膜实际反射率.给出了Co/Sb多层膜反射率的拟合值, 这与实验结果是吻合的.
SubtypeArticle
Indexed ByCSCD
Language中文
CSCD IDCSCD:1486935
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Document Type期刊论文
Version出版稿
Identifierhttp://ir.siom.ac.cn/handle/181231/18316
Collection光学薄膜技术研究与发展中心
Recommended Citation
GB/T 7714
冯仕猛,赵海鹰,邵建达,等. Co/Sb多层膜非单色反射率的计算[J]. 科学通报,2003,48(12):1264.
APA 冯仕猛,赵海鹰,邵建达,范正修,&窦晓鸣.(2003).Co/Sb多层膜非单色反射率的计算.科学通报,48(12),1264.
MLA 冯仕猛,et al."Co/Sb多层膜非单色反射率的计算".科学通报 48.12(2003):1264.
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