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氟化钙(CaF_2)晶体研发进展
Alternative TitleResearch and Development of Calcium Fluoride Crystals
董永军; 周国清; 杨卫桥; 苏良壁; 徐军
2003
Source Publication激光与光电子学进展
Volume40Issue:8Pages:43
Abstract简述了氟化钙(CaF_2)晶体的发展历史,总结其光学特性,介绍了氟化钙晶体的生长新工艺技术和发展。综述了氟化钙晶体在现代信息技术中的应用,特别对氟化钙晶体在紫外波段激光或光刻系统中的应用和发展状况作了重点说明,同时进一步同了目前存在的问题,最后对氟化钙晶体的发展前景作了展望。
SubtypeArticle
Other AbstractThe development history of calcium fluoride (CaF_2) crystals is introduced; its basic perforanmances and properties are summarized. New growth technology as well as the research and development of the crystals are briefly described. Emphasis is put on the application and development status of the crystals in laser and photolithography in the UV wavelength range, and the prospect of the crystals is put forward.
Funding Organization上海市科技发展基金(022261053)资助课题 ; 上海市科技发展基金(022261053)资助课题
Indexed ByCSCD
Language中文
Funding Organization上海市科技发展基金(022261053)资助课题 ; 上海市科技发展基金(022261053)资助课题
CSCD IDCSCD:1215536
Citation statistics
Document Type期刊论文
Version出版稿
Identifierhttp://ir.siom.ac.cn/handle/181231/18305
Collection激光与光电子功能材料研发中心
Affiliation1.Dong Yongjun, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, Shanghai 201800, China.
2.Zhou Guoqing, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, Shanghai 201800, China.
3.Yang Weiqiao, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, Shanghai 201800, China.
4.Su Liangbi, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, Shanghai 201800, China.
5.Xu Jun, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, Shanghai 201800, China.
Recommended Citation
GB/T 7714
董永军,周国清,杨卫桥,等. 氟化钙(CaF_2)晶体研发进展[J]. 激光与光电子学进展,2003,40(8):43.
APA 董永军,周国清,杨卫桥,苏良壁,&徐军.(2003).氟化钙(CaF_2)晶体研发进展.激光与光电子学进展,40(8),43.
MLA 董永军,et al."氟化钙(CaF_2)晶体研发进展".激光与光电子学进展 40.8(2003):43.
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